Galtek® SG Series Pneumatic Valves, 1/4" Orifice, 3-way
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The molded, all-PFA wetted surfaces of this valve provides chemical resistance, ideally suiting the valve for:
- Wafer cleaning
- CMP slurry control
- Photolithography processes
- Analyzer and emissions monitoring applications
Specifications
Notes:
- Port 1 is the normally open port
- Port 2 is the common port
- Port 3 is the normally closed port
The actuator design ensures reliable, long-term port-to-port seal without excessive loads. Each valve is offered with 1/4" or 3/8" Flaretek®, Flaretek "SpaceSaver", PureBond® or FNPT port connections. The reliable industry standard port connections reduce entrapment areas, provide system design flexibility and simplify valve installation.
Part Number | Flow Factor CV | Flow Factor KV | Ports 1 & 3 Connection | Port 2 Connection | Dimensions | ||
A | B | C | |||||
SG4-3C-4F1 | 0.28 | 4.0 | 1/4" Flaretek | 1/4" Flaretek | 2.81" (71.4 mm) | 2.26" (57.4 mm) | 1.46" (37.1 mm) |
SG4-3C-4N | 0.60 | 8.6 | 1/4" FNPT | 1/4" FNPT | 1.96" (49.8 mm) | 1.79" (45.5 mm) | 0.98" (24.9 mm) |
SG4-3C-4P | 0.60 | 8.6 | 1/4" PureBond pipe | 1/4" PureBond pipe | 3.00" (76.2 mm) | 2.30" (58.4 mm) | 1.50" (38.1 mm) |
SG4-3C-4S21,2 | 0.28 | 4.0 | 1/4" Flaretek | 1/4" Flaretek "SpaceSaver" | 2.81" (71.4 mm) | 2.50" (63.5 mm) | 1.70" (43.2 mm) |
SG4-3C-6F1 | 0.60 | 8.6 | 3/8" Flaretek | 3/8" Flaretek | 3.05" (77.5 mm) | 2.33" (59.2 mm) | 1.53" (38.9 mm) |
SG4-3C-6S21,2 | 0.60 | 8.6 | 3/8" Flaretek | 3/8" Flaretek "SpaceSaver" | 3.05" (77.5 mm) | 2.60" (66.0 mm) | 1.80" (45.7 mm) |
1(PVDF), -3 (PFA), -6 (CPFA) or -II (FlareLock II) nuts
2Dimension A with "SpaceSaver" nut. Other "SpaceSaver" versions are available by special order.
Note: Contact Entegris if "SpaceSaver" port connections are to be used in media containing a fluorinated surfactant.
Temperature range: | 73° to 122°F (23° to 50°C), ambient 70° to 212°F (21° to 100°C), fluid |
Media pressure at: | |
70°F (21°C) | Common 80 psig (552 kPa) Normally closed (Port 3) 60 psig (414 kPa) Normally open (Port 1) 60 psig (414 kPa) |
212°F (100°C) | Common 40 psig (276 kPa) Normally closed (Port 3) 30 psig (207 kPa) Normally open (Port 1) 30 psig (207 kPa) |
Pneumatic supply pressure: | 50 psig (335 kPa) minimum to 70 psig (483 kPa) maximum |
Pneumatic supply port: | 10-32 UNF |
Materials: | All wetted parts are PFA and PTFE. Exterior actuator parts are PVDF. Interior actuator parts are PVDF, stainless steel and Viton®. |
Successfully Opted for software Updates
Part Number | Ports 1 & 3 Connection | Port 2 Connection | Options |
---|---|---|---|
SG4-3C-4F | 1/4" Flaretek® | 1/4" Flaretek® | PVDF Flaretek® nut |
SG4-3C-4F-3 | 1/4" Flaretek® | 1/4" Flaretek® | PFA Flaretek® nut |
SG4-3C-4F-6 | 1/4" Flaretek® | 1/4" Flaretek® | CPFA Flaretek® nut |
SG4-3C-4F-II | 1/4" Flaretek® | 1/4" Flaretek® | PFA FlareLock® II nut |
SG4-3C-4N | 1/4" FNPT | 1/4" FNPT | N/A |
SG4-3C-6F | 3/8" Flaretek® | 3/8" Flaretek® | PVDF Flaretek® nut |
SG4-3C-6F-3 | 3/8" Flaretek® | 3/8" Flaretek® | PFA Flaretek® nut |
SG4-3C-6F-6 | 3/8" Flaretek® | 3/8" Flaretek® | CPFA Flaretek® nut |
SG4-3C-6F-II | 3/8" Flaretek® | 3/8" Flaretek® | PFA FlareLock® II nut |