Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
This custom vessel is capable of using pressurization techniques to fill and dispense fluid. This approach eliminates the need for external pumps and the inherent pressure surges and costly maintenance common in systems that use pumps.
For use in dispensing corrosive ultrapure fluids using pressurization techniques
Capable of vacuum to 25" Hg and pressure of 80 psig at ambient conditions
Custom PFA assemblies available with numerous port options and configurations
CE compliance ensures a level of safety that enables use throughout the European Community
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Interested in FluoroPure® 6"?
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Due to the potential variety of overall length options, end caps styles and fitting configurations and sizes, each pressure vessel is handled as a custom assembly. Custom features may include:
The number of port connections
Addition of sight tubes
Configurations To accommodate your specialized needs, we have designed the 6" pressure vessel with flexibility in mind. Two basic vessel configurations are available. On one vessel you may choose to have the injection molded end caps permanently connected to the pipe body by using our patented fusion process. This option eliminates the o-ring seal and potential leak points associated with it. On another vessel you may opt for a flanged end cap so you can remove the top - a featured designed for easy cleaning.
Fill and dispense applications in bulk chemical delivery equipment
Pipe outside diameter:
6.60" (168 mm)
Pipe wall thickness:
0.34" (9 mm)
80 psig (552 kPa) at 77°F (25°C)
25" Hg (847 mbar) at 77°F (25°C)
Pipe and end caps:
Various combinations with a maximum of 3 on top and 3 on bottom
Ports accommodate all standard Entegris tube adapter fittings including PrimeLock®, Flaretek®,PureBond® and Quikgrip®
Note: PureBond pipe fittings must be used to maintain the pressure ratings listed. The pressure ratings referenced do not take into account all fitting combinations that may be used on the vessel. The pressure rating would be determined using the pressure rating for the component with the lowest maximum pressure rating.