Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
The dimensions shown are for all available IntelliGen® HV dispense system fitting configurations.
Cycle Time: Plot of cycle time for IntelliGen HV as compared to a previous generation product; the Encompass demonstrates a 70% shorter cycle time to support leading-edge process times.
Dispense Repeatability: Plot of IntelliGen HV dispense repeatability, for multiple dispense volumes and dispense rates (media: 3900 cP viscosity oil).
Fast Filter Flush-up and Prevention of Air: Bubbles in Dispense Plot of filter flush-up of Impact HV filter on the IntelliGen HV pump, demonstrating fast flush-up, and that any air introduced into the pump inlet is vented at the filter, and does not dispense onto the wafer.