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Flow Range: Flow ranges are scaled to zero flow, measurement is from 10-100% of full scale flow range.
Inlet/Outlet Port Connection: For PrimeLock® and other options not shown here, please contact Entegris.
Electrical Connector Type: For electrical connector types G01 and G06, a 14-pin mating cable is required for installation. See accessories section for more information.
Seals:The primary and secondary seals are Kalrez® 6375UP and Viton® material, respectively.

Product specified with a flared tube connection is packaged with two PVDF nuts. For alternative nut materials, or custom configurations and specifications, please contact the factory.

For help selecting the correct model, view the Technical Note: Materials of Construction and Chemical Compatibility for Sensing and Control Products  found in the Reference Materials at the bottom of this page.