We offer ultrapure PFA tubing for use in highly corrosive environments and where resistance to certain specialized developers containing surfactants is required.
Compliant to SEMI Standard F57-0314, the specification for polymer components used in ultrapure water and liquid chemical distribution systems (Note: UMT 3M 6502UHP tubing is still undergoing qualification)
Made from high purity PFA material to provide the lowest extractable ionic and organic levels
An optional ultraclean (UC) extrusion process yields tubing with the lowest total metal extractables and least amount of surface contamination
Permanently laser marked to allow 100% lot traceability to a specific material lot, production date and production inspection record; custom laser marking is available
Read MoreRead Less
Specify Your Part
Interested in an Entegris Product?
To discuss your specific needs, contact your local Entegris representative.
FluoroLine PFA tubing pressure ratings were established using ASTM D2837. This test exposes the tubing to long-term, constant pressures at various temperature settings. Our test took 22 months to complete. From the analysis, a hydrostatic design basis (HDB) value is multiplied by a safety design factor to obtain a hydrostatic design stress. The HDB value is used to determine the tubing operating parameters. FluoroLine PFA tubing completed this extensive testing.
All FluoroLine tubing products are fully characterized and all performance ratings are derived from quantifiable data. Our design and process expertise allow you to confidently design your fluid systems reliably and safely.
Pressure Loss vs. Flow
(Reference the 5th, 6th and 7th charts) This data is for water (fluid with s.g. = 1.0). For pressure loss vs. flow capability outside of these calculations, please contact Entegris.
Laser Marking Codes
ENTEGRIS 440 4 0123456789
Work Order Number
440 = FluoroLine AT high purity PFA
4 = 1/4" (6.4 mm)
Work order number traceable to a specific material lot number, date manufactured, and production inspection record
450 = FluoroLine UAT high purity PFA
5 = 5/16" (7.9 mm)
950 = FluoroLine XAT high purity PFA
6 = 3/8" (9.5 mm)
231 = FluoroLine XKT high purity PFA
8 = 1/2" (12.7 mm)
6502 = FluoroLine UMT high purity PFA
12 = 3/4" (19.1 mm)
16 = 1" (25.4 mm)
20 = 1 1/4" (31.8 mm)
24 = 1 1/2" (38.1 mm)
25 = 1.57" (40 mm)
Maximum Pressure Rating Chart
FluoroLine Ultrapure PFA Tubing
Maximum pressure capabilities of various sizes are listed below. (Flaretek nut ratings are included as a reference.) These ratings are provided as a guide in system design. The component with the lowest maximum pressure rating determines your system maximum pressure rating.