E2600 Filter Housing
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- For EUV, DUV Scanners
- Photolithography
- Optics and resists
Specifications
Connections | Compression fitting | |
Operating conditions | Maximum flow rate | 2,600 m3/hr (1530 cfm) |
Clean Dry Air (CDA) | 655 kPa (95 psig); negligible flow | |
Dimensions | Length | 1200 mm (47.2") |
Width | 838 mm (33.0") | |
Height | 1842 mm (72.5") |
Successfully Opted for software Updates
Part Number | Weight | Airflow Resistance | Operating Conditions - Maximum Flow Rate | Operating Conditions - Clean Dry Air (CDA) | Select Option | Select Option | Height | Length | Width |
---|---|---|---|---|---|---|---|---|---|
ESI004802-01 | Cabinet: 435 kg (960 lbs); Filters: 180 kg (396 lbs) | 500 Pa at 2600 m3/hr | 2,600 m3/hr (1530 cfm) | 655 kPa (95 psig); negligible flow | 12-pack SilverSet® chemical filters | 12-pack VaporSorb® CS-32 chemical filters | 1842 mm (72.5") | 1200 mm (47.2") | 838 mm (33") |