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VaporSorb™ PVD Chemical Filters

VaporSorb™ PVD Chemical Filters deliver complete protection against the full range of airborne molecular contaminants at 22 nm and lower.

  • Protect both process equipment and wafers from the damaging effects of airborne molecular contamination. Protects against AMC at 22 nm and below
  • Balanced media blend to target acid contaminants
  • Removes critical acids, bases and organics to reduce contamination risk 
  • Backed by Entegris OEM-certified, ISO 17025-accredited laboratories
  • Read More Read Less
Interested in VaporSorb™ PVD Chemical Filters?

Contact your Entegris account manager or  contact us

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