Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
VaporSorb™ ECD Chemical Filters provide complete protection against the full range of airborne molecular contaminants at 22 nm and below. Our filters utilize standard filtration media and custom media blends to meet AMC removal requirements
Protects against AMC at 22 nm and below
Balanced media blend to target acid contaminants
Removes critical acids, bases and organics to reduce contamination risk
Backed by Entegris OEM-certified, ISO 17025-accredited laboratories
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Interested in Vaporsorb™ ECD Chemical Filters?
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ApplicationsVaporsorb™ ECD Chemical Filters Applications
Clear anodized aluminum
Application-specific blends of high performance adsorbents
Clear anodized aluminum and polyester scrim
Closed cell polyethylene
Air velocity distribution:
9 points 0.1 m downstream of filter @ 0.5 m/s face velocity