Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
VaporSorb™ ETC Chemical Filters deliver complete protection against the full range of airborne molecular contaminants at 22 nm and lower. They provide field- and lab-proven for use in semiconductor manufacturing environments, including lithography, etch, CPM, metrology and reticle storage areas.
Removes AMCs in single filter cell with over 95% efficiency
Custom blends available to meet a specific list of target AMCs
Removes critical acids, bases and organics to reduce contamination risk
Low pressure drop reduces energy costs
Materials of construction certified zero off gas
Optimized for cleanroom, high-flow make up air, AMC control
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Ship dates will be confirmed upon receipt of your order confirmation.Ship dates will be confirmed upon receipt of your order confirmation.