Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Particles2: Less than 0.03 particles/Liter (less than 1 particle/ft3) greater than 0.01 µm
Volatiles3: Volatile outgassing of H2O, O2 and THC is below detectable limits (by RGA and FID at room temperature)
Surface finish interior:
≤5 µin Ra
Helium leak rating:
Qualified: 2 x10-10cc/min.
Tested: 1 x 10-9 cc/min.
Maximum operating conditions:
Maximum inlet pressure: 70 bar (1000 PSI) at 100°C
Maximum forward/reverse differential pressure: 10 bar (150 PSID)
Maximum operating temperature:
Inert gases: 400°C at 35 bar (500 PSI)
Corrosive and reactive gases: 50°C at 70 bar (1000 PSI)
Greater than 99.9999999% (9 LRV) removal of all particles at 30 SLPM
Greater than 99.9999% removal of all particles at 75 SLPM (referenced at the most penetrating particle size).
Refer to flow curve
2 Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD) 3 Volatile cleanliness qualified following SEMASPEC Test Methods for: THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), Oxygen Contribution (#90120398B-STD)