Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Volatile outgassing of H2O, O2 and THC is below detectable limits (by RGA and FID at room temperature)
Surface finish interior:
≤5 µin Ra
Total flow area:
Helium leak rating:
2 x 10-10 atm-cc/sec
1 x 10-9 atm-cc/sec
Maximum inlet pressure
52 bar (750 PSIG) @ 100°C
Maximum forward/reverse differential pressure
7 bar (100 PSID)
Maximum operating temperature
400°C @ 27.5 bar (400 PSIG)
Corrosive and reactive gases
50°C @ 52 bar (750 PSIG)
Greater than 99.9999999% (9 LRV) removal of all particles at 300 SLPM; greater than 99.9999% (6 LRV) removal of all particles at 750 SLPM (referenced at the most penetrating particle size)
See performance data
1 Particle cleanliness qualified following SEMASPEC Test Method for Particle Shedding (#93021511A-STD). 2 Verified at 100 SLPM for 1⁄4² gasket seal fitting (compatible with VCR® fitting). 3 Volatile cleanliness qualified following SEMASPEC Test Methods for: THC Contribution (#90120396B-STD), Moisture Contribution (#90120397B-STD), Oxygen Contribution (#90120398B-STD).