Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Superior particulate filtration for ultrapure gas systems. Wafergard® II F Mini XL gas filters deliver excellent compatibility with all classes of semiconductor process gases. Use them in gas panels and gas cabinets where ultrapure gas is required for wafer processing.
PTFE membranes provide high-efficiency filtration
Low pressure drop reduces the risk of condensation in low vapor pressure gases
Excellent compatibility with all classes of semiconductor process gases
For use with inert and reactive gases, including ozone
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