GateKeeper® HX Series Gas Purification Systems
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- Bulk Gas
- Epitaxy
Specifications
Model | GPS20HX | GPS30HX | GPS50HX | GPS60HX |
---|---|---|---|---|
Gases purified: | Hydrogen (H2), nitrogen (N2) or argon (Ar) | |||
Media type: | Inorganic | |||
Contaminants removed: | Moisture (H2O) <50 in argon and nitrogen | <100 ppt in hydrogen | ||
Carbon monoxide (CO) | <1 ppb | |||
Carbon dioxide (CO2) | <100 ppt | |||
Oxygen (O2) | <400 ppt | |||
Non-methane hydrocarbons (C5 and higher) | <1 ppt | |||
Operating pressure range: | 5.51–17.23 bar (80 –250 psig) | |||
Pressure drop: | <15 psi @ 100 psig and max rated flow | |||
Maximum flow rate: | 20 Nm3/hr (311 SLM) | 30 Nm3/hr (466 SLM) | 50 Nm3/hr (776 SLM) | 60 Nm3/hr (932 SLM) |
Gas operating temperature: | 15°C–40°C (60°F–104°F) | |||
Outlet filtration (ISO Class 1): | <10 particles per m3 @ 0.1 μm | |||
<2 particles per m3 @ 0.2 μm | ||||
Leak rating: | 1 × 10-9 atm cc/sec |
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