Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
GateKeeper® Gas Purification System (GPS) SX Series is the latest continuous service gas purification system from Entegris. This advanced gas purification technology provides semiconductor manufacturers with an innovative, efficient and cost effective solution.
Purifies to part-per-billion (ppb) levels
Low pressure resulting in no changes to inlet pressure required
Low cost of ownership
Ambient temperature purification for low energy costs and resource conservation
Power failure will not damage purification system
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Interested in GateKeeper® SX Series Gas Purification Systems?
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ApplicationsGateKeeper® SX Series Gas Purification Systems Applications
Metal Organic Chemical Vapor (MOCVD)
Atomic Layer Deposition (ALD)
Low Temperature Epitaxy (LTE)
Other applications requiring ammonia gas
Moisture (H2O): <1 ppb
Carbon Dioxide (CO2): <1 ppb
Oxygen (O2): <1 ppb
Operating pressure range
5.51 – 17.23 bar (80 – 250 psig)
<15 psi @ 100 psig and max rated flow
Maximum flow rate
90 N•m3/hr (1397 slm)
100 N•m3/hr (1553 slm)
120 N•m3/hr (1863 slm)
Gas operating temperature
15° – 40°C (60° – 104°F)
ISO® Class 1 (<10 particles per m3 at 0.1 μm, <2 particles per m3 at 0.2 μm)