GateKeeper® DX Series Gas Purification Systems
Contact your Entegris account manager or
- Photolithography
- Applications that require purified CO2 gas
- Wet Etch and Clean
Specifications
Model | GPS20DX | GPS30DX | GPS50DX | GPS60DX |
Gases purified: | Carbon dioxide (CO2) | |||
Media type: | Inorganic | |||
Contaminants removed: | Volatile acids (measured as SO2) | <5 ppt | ||
Volatile bases (measured as NH3) | <500 ppt | |||
Refractory compounds (measured as HMDSO) | <5 ppt | |||
Noncondensable organics (measured as Butane) | <5 ppt | |||
Condensable organics (measured as Toluene) | <5 ppt | |||
Moisture (H2O) | <1 ppb | |||
Operating pressure range: | 5.51–17.23 bar (80 –250 psig) | |||
Pressure drop: | <15 psi @ 100 psig and max rated flow | |||
Maximum flow rate: | 20 Nm3/hr (311 SLM) | 30 Nm3/hr (466 SLM) | 50 Nm3/hr (776 SLM) | 60 Nm3/hr (932 SLM) |
Gas operating temperature: | 15°C–40°C (60°F–104°F) | |||
Outlet filtration (ISO Class 1): | <10 particles per m3 @ 0.1 μm | |||
<2 particles per m3 @ 0.2 μm | ||||
Leak rating: | 1 × 10-9 atm cc/sec |
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