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MegaTorr^® Palladium Hydrogen Gas Purifiers

Our PD Series advanced palladium gas purifiers offer two to three times higher capacity than other models, with lower cost and improved durability for high-volume manufacturing processes.

Palladium acts as a catalyst causing hydrogen (H₂) gas molecules to dissociate into atoms upon contacting the membrane surface
The atoms are small enough to diffuse through the palladium membrane, driven by differential H₂ pressure across the membrane, they then recombine into molecules after passing through the membrane
Palladium provides a solid barrier with no breakthrough as compared to catalysts and getters that rely on chemical reactions on reactive surface areas
Optimized design provides sub-ppb performance in small footprints with flow rates up to 2,170 slpm (130 Nm³/hr)
Includes models PS7-PD05, PS7-PD1, and PS7-PD2 with various flow capabilities for all your application needs

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Interested in MegaTorr^® Palladium Hydrogen Gas Purifiers?

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Applications MegaTorr^® Palladium Hydrogen Gas Purifiers Applications

Ideally suited for point-of-use H₂ gas purification single process tools or bulk gas supply in semiconductor and LED applications including:

GaN epitaxy
Silicon carbide (SiC) epitaxy
III/V and II/VI MOCVD
Photovoltaics
Polysilicon production
Gas chromatography (GC)
Analytical instrument zero/carrier gas
Carbon nanotubes
Metallurgy
Fiber optic processes
Fuel cells

Specifications

Features

Ultrapure H₂ from any source
< 99.9999999% purity; < 1 ppb total impurities
Patented palladium micro-channel technology
Lowest power consumption
Smallest footprint
Automatic nitrogen (N₂) purge for cell protection
Color touchscreen HMI with PLC controller
Outlet check valve to prevent back diffusion
Boost bleed valve for quick bleed line purging
Electrical cabinet purge
High/low temperature alarms
CE marked

Palladium Advantages

Only H₂ passes through the pure side
Every impurity is removed, no exceptions
Nonconsumable technology
Separates pure H₂ from source gas with ppm or % level impurities
Easy to verify performance with in-situ helium (He) leak test

Product Specifications

Gases purified	H₂
Impurites removed	H₂O, O₂, CO, CO₂, N₂, He, Ar, THC (including CH₄) < 1 ppb
Note:	Purifiers are gas specific and should only be used for the gases indicated

PD05 Series	Flow rates Assuming 200 psig inlet pressure, 60 psig outlet pressure	Power
PS7-PD05-08	5.5 slpm (0.3 Nm³/hr)	120 VAC or 230 VAC
PS7-PD05-21	12.5 slpm (0.8 Nm³/hr)	120 VAC or 230 VAC
PS7-PD05-50	28.4 slpm (1.7 Nm³/hr)	120 VAC or 230 VAC

PD1 Series	Flow rates Assuming 260 psig inlet pressure, 80 psig outlet pressure	Power
PS7-PD1-10	96 slpm (5.8 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-20	193 slpm (11.6 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-30	290 slpm (17.4 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-40	386 slpm (23.2 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-50	483 slpm (29.0 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-60	580 slpm (34.8 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-70	676 slpm (40.6 Nm³/hr)	208 VAC or 230 VAC

PD2 Series	Flow rates Assuming 260 psig inlet pressure, 80 psig outlet pressure	Power
PS7-PD2-40	773 slpm (46.4 Nm³/hr)	208 VAC or 230 VAC
PS7-PD2-50	966 slpm (58.0 Nm³/hr)	208 VAC or 230 VAC
PS7-PD2-60	1,160 slpm (69.6 Nm³/hr)	208 VAC or 230 VAC
PS7-PD2-70	1,353 slpm (81.2 Nm³/hr)	208 VAC or 230 VAC

Note:	Otherflow rates are available. Contact Entegris for details.

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Feb 1, 2019 Data Sheet Palladium Hydrogen Purifiers: PD1, PD2

Download PDF 285.0 kB

Published Sep 4, 2019 Brochure Gas Purification Solutions

Download PDF 586.1 kB

MegaTorr® Palladium Hydrogen Gas Purifiers

Specifications

Features

Palladium Advantages

MegaTorr^® Palladium Hydrogen Gas Purifiers