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MegaTorr® Palladium Hydrogen Gas Purifiers
Interested in MegaTorr® Palladium Hydrogen Gas Purifiers?
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Reference Materials
Applications
Ideally suited for point-of-use H2 gas purification single process tools or bulk gas supply in semiconductor and LED applications including:
- GaN epitaxy
- Silicon carbide (SiC) epitaxy
- III/V and II/VI MOCVD
- Photovoltaics
- Polysilicon production
- Gas chromatography (GC)
- Analytical instrument zero/carrier gas
- Carbon nanotubes
- Metallurgy
- Fiber optic processes
- Fuel cells
Specifications
Features
|
Palladium Advantages
|
Gases purified | H2 | ||
Impurites removed | H2O, O2, CO, CO2, N2, He, Ar, THC (including CH4) < 1 ppb | ||
Note: | Purifiers are gas specific and should only be used for the gases indicated |
PD05 Series | Flow rates Assuming 200 psig inlet pressure, 60 psig outlet pressure | Power |
PS7-PD05-08 | 5.5 slpm (0.3 Nm3/hr) | 120 VAC or 230 VAC |
PS7-PD05-21 | 12.5 slpm (0.8 Nm3/hr) | 120 VAC or 230 VAC |
PS7-PD05-50 | 28.4 slpm (1.7 Nm3/hr) | 120 VAC or 230 VAC |
PD1 Series | Flow rates Assuming 260 psig inlet pressure, 80 psig outlet pressure | Power |
PS7-PD1-10 | 96 slpm (5.8 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-20 | 193 slpm (11.6 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-30 | 290 slpm (17.4 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-40 | 386 slpm (23.2 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-50 | 483 slpm (29.0 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-60 | 580 slpm (34.8 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD1-70 | 676 slpm (40.6 Nm3/hr) | 208 VAC or 230 VAC |
PD2 Series | Flow rates Assuming 260 psig inlet pressure, 80 psig outlet pressure | Power |
PS7-PD2-40 | 773 slpm (46.4 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD2-50 | 966 slpm (58.0 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD2-60 | 1,160 slpm (69.6 Nm3/hr) | 208 VAC or 230 VAC |
PS7-PD2-70 | 1,353 slpm (81.2 Nm3/hr) | 208 VAC or 230 VAC |
Note: | Otherflow rates are available. Contact Entegris for details. |
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