Sign In
Sign In

Please enter a valid email address in the field above Please enter your password in the field above.
- Forgot Password?
Forgot Password?

Please enter the email address for your account. A link to change your password will be emailed to you.
All Fields Required

Email:

Please enter an email address in the field above

Cancel
Sign Out
My Account
Quick Order Pad
Enter Part Numbers below to add them to your cart

Need to order more than 3 items?
Go to the Quick Order Page
Part Number Qty
Product Not Found. Please remove or try a different part number.

The Minimum Order Quantity for this item is1
Product Not Found. Please remove or try a different part number.

The Minimum Order Quantity for this item is1
Product Not Found. Please remove or try a different part number.

The Minimum Order Quantity for this item is1
Please correct any errors above before adding to cart.
Quick Order Pad
Contact Us
Cart
Language
Choose Language
- English
- 日本語
Currency
Choose Currency
- CNY ¥
- EUR €
- GBP £
- ILS ₪
- JPY ¥
- KRW ₩
- SGD $
- TWD NT$
- USD $

MegaTorr^® Palladium Hydrogen Gas Purifiers

Our PD Series advanced palladium gas purifiers offer two to three times higher capacity than other models, with lower cost and improved durability for high-volume manufacturing processes.

Palladium acts as a catalyst causing hydrogen (H₂) gas molecules to dissociate into atoms upon contacting the membrane surface
The atoms are small enough to diffuse through the palladium membrane, driven by differential H₂ pressure across the membrane, they then recombine into molecules after passing through the membrane
Palladium provides a solid barrier with no breakthrough as compared to catalysts and getters that rely on chemical reactions on reactive surface areas
Optimized design provides sub-ppb performance in small footprints with flow rates up to 2,170 slpm (130 Nm³/hr)
Includes models PS7-PD05, PS7-PD1, and PS7-PD2 with various flow capabilities for all your application needs

Read More Read Less

Interested in MegaTorr^® Palladium Hydrogen Gas Purifiers?

Contact your Entegris account manager or Contact Us

Top of page

Applications MegaTorr^® Palladium Hydrogen Gas Purifiers Applications

Ideally suited for point-of-use H₂ gas purification single process tools or bulk gas supply in semiconductor and LED applications including:

GaN epitaxy
Silicon carbide (SiC) epitaxy
III/V and II/VI MOCVD
Photovoltaics
Polysilicon production
Gas chromatography (GC)
Analytical instrument zero/carrier gas
Carbon nanotubes
Metallurgy
Fiber optic processes
Fuel cells

Specifications

Features

Ultrapure H₂ from any source
< 99.9999999% purity; < 1 ppb total impurities
Patented palladium micro-channel technology
Lowest power consumption
Smallest footprint
Automatic nitrogen (N₂) purge for cell protection
Color touchscreen HMI with PLC controller
Outlet check valve to prevent back diffusion
Boost bleed valve for quick bleed line purging
Electrical cabinet purge
High/low temperature alarms
CE marked

Palladium Advantages

Only H₂ passes through the pure side
Every impurity is removed, no exceptions
Nonconsumable technology
Separates pure H₂ from source gas with ppm or % level impurities
Easy to verify performance with in-situ helium (He) leak test

Product Specifications

Gases purified	H₂
Impurites removed	H₂O, O₂, CO, CO₂, N₂, He, Ar, THC (including CH₄) < 1 ppb
Note:	Purifiers are gas specific and should only be used for the gases indicated

PD05 Series	Flow rates Assuming 200 psig inlet pressure, 60 psig outlet pressure	Power
PS7-PD05-08	5.5 slpm (0.3 Nm³/hr)	120 VAC or 230 VAC
PS7-PD05-21	12.5 slpm (0.8 Nm³/hr)	120 VAC or 230 VAC
PS7-PD05-50	28.4 slpm (1.7 Nm³/hr)	120 VAC or 230 VAC

PD1 Series	Flow rates Assuming 260 psig inlet pressure, 80 psig outlet pressure	Power
PS7-PD1-10	96 slpm (5.8 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-20	193 slpm (11.6 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-30	290 slpm (17.4 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-40	386 slpm (23.2 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-50	483 slpm (29.0 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-60	580 slpm (34.8 Nm³/hr)	208 VAC or 230 VAC
PS7-PD1-70	676 slpm (40.6 Nm³/hr)	208 VAC or 230 VAC

PD2 Series	Flow rates Assuming 260 psig inlet pressure, 80 psig outlet pressure	Power
PS7-PD2-40	773 slpm (46.4 Nm³/hr)	208 VAC or 230 VAC
PS7-PD2-50	966 slpm (58.0 Nm³/hr)	208 VAC or 230 VAC
PS7-PD2-60	1,160 slpm (69.6 Nm³/hr)	208 VAC or 230 VAC
PS7-PD2-70	1,353 slpm (81.2 Nm³/hr)	208 VAC or 230 VAC

Note:	Otherflow rates are available. Contact Entegris for details.