Guardian™ ECD Filter

Advanced, ultra-clean filtration of low-temperature, dilute acids and bases. Enables effective flow rate and contaminant retention performance in sub 90 nm technology nodes.

Read More Read Less

Specify Your Part

Form Factor

Typical Flow Rate

Filter Cleaning

Chemlock Key

Shell Type

Length

Retention Rating

Connection

O-ring

Part Number:

Interested in an Entegris Product?

To discuss your specific needs, contact your local Entegris representative.

Don't have an Entegris representative?

Request a Quote

Please fill out the form below and someone will contact you shortly. Have an account? Sign In

* Required

First Name:

Please enter a first name

Last Name:

Please enter a last name

Country:

Please select a country

Email Address:

Please enter a valid email

Phone Number:

Please enter a valid phone number.

Company:

Please enter your company.

(Optional) Comments

An error occurred while submitting your quote request. Please try again.

Cancel

Quote Requested

Thank you for requesting a quote. Someone from Entegris will contact you shortly.

Your quote number is {0}.

Top of page

Applications Guardian™ ECD Filter Applications

Industry: Semiconductor, Flat Panel Display, Data Storage
Process: Wet Etch and Clean
Chemistry: Dilute Acids, Dilute Bases
Installation Point: Point of Tool

Specifications

Drawings

Performance Data

Product Specifications

Materials:	Membrane	Hydrophilic polyethersulfone (PES) or polysulfone (PSF)
	Supports, core and sleeve	High-density polyethylene (HDPE)
	Code 0 double 2-222 o-rings	E-FKM or Kalrez® 4079
Membrane area:	PEX 0.1 and 0.05 µm	1.0 m² (10.8 ft²)
	PEM 0.03 µm	1.2 m² (13.3 ft²)
Operating conditions:	Maximum forward/reverse pressure	0.34 MPa (3.4 bar, 49 psi) @ 25°C (77°F)
	Maximum operating temperature	60°C (140°F)
Compatibility:	Electrochemical deposition processes, as well as various wet etch and clean dilute low temperature chemicals*

Reference Materials Product Documentation

Published Jun. 21, 2016 Data Sheet Guardian™ ECD Cartridge Filters

Download PDF 274.0 kB

Published Dec. 1, 2014 Data Sheet Guardian™ ECD UC Liquid Filters

Download PDF 880.4 kB

CAD CAD Symbols

CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.

Go to Part Selector

Part Numbers

Guardian™ ECD Filter Part Numbers

Part Number	Form Factor	Typical Flow Rate	Filter Cleaning	Chemlock Key	Shell Type	Length	Retention Rating	Connection	O-ring
EC2FM1CM01FD	Chem-Line™ II Large Disposable	Mid flux	Ultra Clean	N/A	PP	10"	5 nm	In-line 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
EC2FM1CM21FD	Chem-Line™ II Large Disposable	Mid flux	Ultra Clean	N/A	PP	10"	5 nm	In-line 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
EC2FM1CM31FD	Chem-Line™ II Large Disposable	Mid flux	Ultra Clean	N/A	PP	10"	5 nm	In-line 3/8" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
EC2FM1CM41FD	Chem-Line™ II Large Disposable	Mid flux	Ultra Clean	N/A	PP	10"	5 nm	In-line 1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
EC2FMSCM21FD	Chem-Line™ I Large Disposable	Low Flux	Ultra Clean	N/A	PFA	4"	5 nm	In-line 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
ECCFM1C000D	Cartridge	Mid flux	Ultra Clean	No	N/A	10"	5 nm	N/A	E-FKM
ECCFM1C00KD	Cartridge	Mid flux	Ultra Clean	Yes	N/A	10"	5 nm	N/A	E-FKM
ECCFM1C0RKD	Cartridge	Mid flux	Ultra Clean	Yes	N/A	10"	5 nm	N/A	Kalrez® 6375
ECCFM2C000D	Cartridge	Mid-High Flux	Ultra Clean	No	N/A	20"	5 nm	N/A	E-FKM
ECCFM2C00KD	Cartridge	Mid-High Flux	Ultra Clean	Yes	N/A	20"	5 nm	N/A	E-FKM
ECCFM2C0RKD	Cartridge	Mid-High Flux	Ultra Clean	Yes	N/A	20"	5 nm	N/A	Kalrez® 6375
ECCFMSC000D	Cartridge	Low Flux	Ultra Clean	No	N/A	4"	5 nm	N/A	E-FKM
ECCFMSC00KD	Cartridge	Low Flux	Ultra Clean	Yes	N/A	4"	5 nm	N/A	E-FKM
ECDV01P01	Cartridge	Mid flux	Standard	No	N/A	10"	0.1 µm	N/A	E-FKM
ECDV01P01K	Cartridge	Mid flux	Standard	Yes	N/A	10"	0.1 µm	N/A	E-FKM
ECDV02P01	Cartridge	Mid-High Flux	Standard	No	N/A	20"	0.1 µm	N/A	E-FKM
ECDY01M01	Cartridge	High Flux	Standard	No	N/A	10"	30 nm	N/A	E-FKM
ECDY01M01K	Cartridge	High Flux	Standard	Yes	N/A	10"	30 nm	N/A	E-FKM
ECDY01MK1	Cartridge	High Flux	Standard	No	N/A	10"	30 nm	N/A	Kalrez® 4079
ECDY01MK1K	Cartridge	High Flux	Standard	Yes	N/A	10"	30 nm	N/A	Kalrez® 4079
ECDY02M01	Cartridge	High Flux	Standard	No	N/A	20"	30 nm	N/A	E-FKM
ECDY02M01K	Cartridge	High Flux	Standard	Yes	N/A	20"	30 nm	N/A	E-FKM
ECDY02MK1	Cartridge	High Flux	Standard	No	N/A	20"	30 nm	N/A	Kalrez® 4079
ECDY02MK1K	Cartridge	High Flux	Standard	Yes	N/A	20"	30 nm	—	Kalrez® 4079
ECDY0SM01	Cartridge	Low Flux	Standard	No	N/A	4"	30 nm	N/A	E-FKM
ECDY0SM01K	Cartridge	Low Flux	Standard	Yes	N/A	4"	30 nm	N/A	E-FKM
ECDY0SMK1	Cartridge	Low Flux	Standard	No	N/A	4"	30 nm	N/A	Kalrez® 4079
ECDYPEM0F	Chem-Line™ I Large Disposable	High Flux	Standard	No	PP	10"	30 nm	3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
ECDYPEM4F	Chem-Line™ I Large Disposable	High Flux	Standard	No	PP	10"	30 nm	1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
ECLFM1CM01SD	Chem-Line™ II Large Disposable	Mid flux	Ultra Clean	N/A	PFA	10"	5 nm	3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	N/A
ECLFM1CM21SD	Chem-Line™ II Large Disposable	Mid flux	Ultra Clean	N/A	PFA	10"	5 nm	1/2" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	N/A
ECLFM1CM41FD	Chem-Line™ II Large Disposable	Mid flux	Ultra Clean	N/A	PFA	10"	5 nm	In-line 1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A
ECLFM1CM41SD	Chem-Line™ II Large Disposable	Mid flux	Ultra Clean	N/A	PFA	10"	5 nm	In-line 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	N/A