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Guardian™ ECD Filter
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Reference Materials
CAD
CAD drawings may be available for this product. Please use the Part Selector to select a part number to see if they are available.
Applications
- Industry: Semiconductor, Flat Panel Display, Data Storage
- Process: Wet Etch and Clean
- Chemistry: Dilute Acids, Dilute Bases
- Installation Point: Point of Tool
Specifications
Chem-Line II (PP) Disposable Filter Dimensions | ||
| Dimension A | ||
| Inlet/outlet size | 4" disposable filter | 10" disposable filter |
| 3/8" | 237 mm (9.32") | 350 mm (13.77") |
| 1/2" | 247 mm (9.72") | 360 mm (14.17") |
| 3/4" | 247 mm (9.72") | 360 mm (14.17") |
| 1" | 257 mm (10.12") | 370 mm (14.57") |
| Vent/drain for all versions is 1/4" | ||
| Chem-Line II (PFA) Disposable Filter Dimensions Super 300 Type PIllar® fittings (reference 4th drawing above) | Chem-Line II (PFA) Disposable Filter Dimensions Flaretek fittings (reference 5th drawing above) | |||
| Dimension A | Dimension A | |||
| Inlet/outlet size | 10" filter | Inlet/outlet size | 10" filter | |
| 1/2" | 355 mm (13.96") | 1/2" | 370 mm (14.57") | |
| 3/4" | 364 mm (14.31") | 3/4" | 373 mm (14.68") | |
| 1" | 397 mm (16.62") | 1" | 382 mm (15.02") | |
| Vent/drain for all versions is 1/4" | Vent/drain for all versions is 1/4" | |||
| Materials | Membrane: | Hydrophilic polyethersulfone (PES) or polysulfone (PSF) |
| Supports, core and sleeve: | High-density polyethylene (HDPE) | |
| Code 0 double 2-222 O-rings: | E-FKM or Kalrez® 4079 | |
| Membrane area | PEX 0.1 µm | 1.0 m² (10.8 ft²) |
| PEM 0.03 µm | 1.2 m² (13.3 ft²) | |
| Operating conditions | Maximum forward/reverse pressure: | 0.34 MPa (3.4 bar, 49 psi) @ 25°C (77°F) |
| Maximum operating temperature: | 60°C (140°F) | |
| Compatibility | Electrochemical deposition processes, as well as various wet etch and clean dilute low temperature chemicals* | |
*Please consult with your Entegris applications specialist concerning your specific application.
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Part Numbers
| Part Number | Retention Rating | Length | Form Factor | Shell Type | Connection | Chemlock® Key | O-ring | Filter Cleaning |
|---|---|---|---|---|---|---|---|---|
| EC2FM1CM01FD | 5 nm | 10" | Chem-Line™ II Large Disposable | PP | In-line 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A | N/A | Ultraclean (UC) |
| EC2FM1CM21FD | 5 nm | 10" | Chem-Line™ II Large Disposable | PP | In-line 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A | N/A | Ultraclean (UC) |
| EC2FM1CM31FD | 5 nm | 10" | Chem-Line™ II Large Disposable | PP | In-line 3/8" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A | N/A | Ultraclean (UC) |
| EC2FM1CM41FD | 5 nm | 10" | Chem-Line™ II Large Disposable | PP | In-line 1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A | N/A | Ultraclean (UC) |
| EC2FMSCM21FD | 5 nm | 4" | Chem-Line™ I Large Disposable | PFA | In-line 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A | N/A | Ultraclean (UC) |
| ECCFM1C000D | 5 nm | 10" | Cartridge | N/A | N/A | No | E-FKM | Ultraclean (UC) |
| ECCFM1C00KD | 5 nm | 10" | Cartridge | N/A | N/A | Yes | E-FKM | Ultraclean (UC) |
| ECCFM1C0RKD | 5 nm | 10" | Cartridge | N/A | N/A | Yes | Kalrez® 6375 | Ultraclean (UC) |
| ECCFM2C000D | 5 nm | 20" | Cartridge | N/A | N/A | No | E-FKM | Ultraclean (UC) |
| ECCFM2C00KD | 5 nm | 20" | Cartridge | N/A | N/A | Yes | E-FKM | Ultraclean (UC) |
| ECCFM2C0RKD | 5 nm | 20" | Cartridge | N/A | N/A | Yes | Kalrez® 6375 | Ultraclean (UC) |
| ECCFMSC000D | 5 nm | 4" | Cartridge | N/A | N/A | No | E-FKM | Ultraclean (UC) |
| ECCFMSC00KD | 5 nm | 4" | Cartridge | N/A | N/A | Yes | E-FKM | Ultraclean (UC) |
| ECDV01P01 | 0.1 µm | 10" | Cartridge | N/A | N/A | No | E-FKM | Standard |
| ECDV01P01K | 0.1 µm | 10" | Cartridge | N/A | N/A | Yes | E-FKM | Standard |
| ECDV02P01 | 0.1 µm | 20" | Cartridge | N/A | N/A | No | E-FKM | Standard |
| ECDY01M01 | 30 nm | 10" | Cartridge | N/A | N/A | No | E-FKM | Standard |
| ECDY01M01K | 30 nm | 10" | Cartridge | N/A | N/A | Yes | E-FKM | Standard |
| ECDY01MK1 | 30 nm | 10" | Cartridge | N/A | N/A | No | Kalrez® 4079 | Standard |
| ECDY01MK1K | 30 nm | 10" | Cartridge | N/A | N/A | Yes | Kalrez® 4079 | Standard |
| ECDY02M01 | 30 nm | 20" | Cartridge | N/A | N/A | No | E-FKM | Standard |
| ECDY02M01K | 30 nm | 20" | Cartridge | N/A | N/A | Yes | E-FKM | Standard |
| ECDY02MK1 | 30 nm | 20" | Cartridge | N/A | N/A | No | Kalrez® 4079 | Standard |
| ECDY02MK1K | 30 nm | 20" | Cartridge | N/A | N/A | Yes | Kalrez® 4079 | Standard |
| ECDY0SM01 | 30 nm | 4" | Cartridge | N/A | N/A | No | E-FKM | Standard |
| ECDY0SM01K | 30 nm | 4" | Cartridge | N/A | N/A | Yes | E-FKM | Standard |
| ECDY0SMK1 | 30 nm | 4" | Cartridge | N/A | N/A | No | Kalrez® 4079 | Standard |
| ECDYPEM0F | 30 nm | 10" | Chem-Line™ I Large Disposable | PP | 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A | N/A | Standard |
| ECDYPEM4F | 30 nm | 10" | Chem-Line™ I Large Disposable | PP | 1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting | N/A | N/A | Standard |