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Guardian™ ECD Filter

Enables advanced, ultraclean, hydrophilic filtration for low-temperature, dilute acids and bases in wet etch and clean processes.

Dual purpose filter that uses a hydrophilic, high-flow polysulfone membrane and is constructed of high-density polyethylene (HDPE) material, which further ensures its inert properties
Available in various lengths and retention ratings to meet your unique application needs
Ultraclean (UC) filtration technology is available, which enables less contamination and faster system flush up while extending tool uptime and increasing device yield.

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Retention Rating

Length

Form Factor

Shell Type

Connection

Chemlock® Key

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Filter Cleaning

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Applications Guardian™ ECD Filter Applications

Industry: Semiconductor, Flat Panel Display, Data Storage
Process: Wet Etch and Clean
Chemistry: Dilute Acids, Dilute Bases
Installation Point: Point of Tool

Specifications

Drawings

Chem-Line II (PP) Disposable Filter Dimensions Flaretek^® fittings (reference 3rd drawing above)
Dimension A
Inlet/outlet size	4" disposable filter	10" disposable filter
3/8"	237 mm (9.32")	350 mm (13.77")
1/2"	247 mm (9.72")	360 mm (14.17")
3/4"	247 mm (9.72")	360 mm (14.17")
1"	257 mm (10.12")	370 mm (14.57")
Vent/drain for all versions is 1/4"

Chem-Line II (PFA) Disposable Filter Dimensions Super 300 Type PIllar^® fittings (reference 4th drawing above)		Chem-Line II (PFA) Disposable Filter Dimensions Flaretek fittings (reference 5th drawing above)
	Dimension A		Dimension A
Inlet/outlet size	10" filter	Inlet/outlet size	10" filter
1/2"	355 mm (13.96")	1/2"	370 mm (14.57")
3/4"	364 mm (14.31")	3/4"	373 mm (14.68")
1"	397 mm (16.62")	1"	382 mm (15.02")
Vent/drain for all versions is 1/4"		Vent/drain for all versions is 1/4"

Performance Data

Product Specifications

Materials:	Membrane	Hydrophilic polyethersulfone (PES) or polysulfone (PSF)
	Supports, core and sleeve	High-density polyethylene (HDPE)
	Code 0 double 2-222 o-rings	E-FKM or Kalrez® 4079
Membrane area:	PEX 0.1 and 0.05 µm	1.0 m² (10.8 ft²)
	PEM 0.03 µm	1.2 m² (13.3 ft²)
Operating conditions:	Maximum forward/reverse pressure	0.34 MPa (3.4 bar, 49 psi) @ 25°C (77°F)
	Maximum operating temperature	60°C (140°F)
Compatibility:	Electrochemical deposition processes, as well as various wet etch and clean dilute low temperature chemicals*

Successfully Opted for software Updates

Reference Materials Product Documentation

Published Jun 21, 2016 Data Sheet Guardian™ ECD Cartridge Filters

Download PDF 274.0 kB

Published Oct 1, 2018 Data Sheet Guardian™ ECD UC Liquid Filters

Download PDF 742.1 kB

Published Aug 31, 2018 Brochure Liquid Filtration Solutions

Download PDF 2.1 MB

Part Numbers

Guardian™ ECD Filter Part Numbers

Part Number	Retention Rating	Length	Form Factor	Shell Type	Connection	Chemlock® Key	O-ring	Filter Cleaning
EC2FM1CM01FD	5 nm	10"	Chem-Line™ II Large Disposable	PP	In-line 3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A	N/A	Ultraclean (UC)
EC2FM1CM21FD	5 nm	10"	Chem-Line™ II Large Disposable	PP	In-line 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A	N/A	Ultraclean (UC)
EC2FM1CM31FD	5 nm	10"	Chem-Line™ II Large Disposable	PP	In-line 3/8" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A	N/A	Ultraclean (UC)
EC2FM1CM41FD	5 nm	10"	Chem-Line™ II Large Disposable	PP	In-line 1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A	N/A	Ultraclean (UC)
EC2FMSCM21FD	5 nm	4"	Chem-Line™ I Large Disposable	PFA	In-line 1/2" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A	N/A	Ultraclean (UC)
ECCFM1C000D	5 nm	10"	Cartridge	N/A	N/A	No	E-FKM	Ultraclean (UC)
ECCFM1C00KD	5 nm	10"	Cartridge	N/A	N/A	Yes	E-FKM	Ultraclean (UC)
ECCFM1C0RKD	5 nm	10"	Cartridge	N/A	N/A	Yes	Kalrez® 6375	Ultraclean (UC)
ECCFM2C000D	5 nm	20"	Cartridge	N/A	N/A	No	E-FKM	Ultraclean (UC)
ECCFM2C00KD	5 nm	20"	Cartridge	N/A	N/A	Yes	E-FKM	Ultraclean (UC)
ECCFM2C0RKD	5 nm	20"	Cartridge	N/A	N/A	Yes	Kalrez® 6375	Ultraclean (UC)
ECCFMSC000D	5 nm	4"	Cartridge	N/A	N/A	No	E-FKM	Ultraclean (UC)
ECCFMSC00KD	5 nm	4"	Cartridge	N/A	N/A	Yes	E-FKM	Ultraclean (UC)
ECDV01P01	0.1 µm	10"	Cartridge	N/A	N/A	No	E-FKM	Standard
ECDV01P01K	0.1 µm	10"	Cartridge	N/A	N/A	Yes	E-FKM	Standard
ECDV02P01	0.1 µm	20"	Cartridge	N/A	N/A	No	E-FKM	Standard
ECDY01M01	30 nm	10"	Cartridge	N/A	N/A	No	E-FKM	Standard
ECDY01M01K	30 nm	10"	Cartridge	N/A	N/A	Yes	E-FKM	Standard
ECDY01MK1	30 nm	10"	Cartridge	N/A	N/A	No	Kalrez® 4079	Standard
ECDY01MK1K	30 nm	10"	Cartridge	N/A	N/A	Yes	Kalrez® 4079	Standard
ECDY02M01	30 nm	20"	Cartridge	N/A	N/A	No	E-FKM	Standard
ECDY02M01K	30 nm	20"	Cartridge	N/A	N/A	Yes	E-FKM	Standard
ECDY02MK1	30 nm	20"	Cartridge	N/A	N/A	No	Kalrez® 4079	Standard
ECDY02MK1K	30 nm	20"	Cartridge	N/A	N/A	Yes	Kalrez® 4079	Standard
ECDY0SM01	30 nm	4"	Cartridge	N/A	N/A	No	E-FKM	Standard
ECDY0SM01K	30 nm	4"	Cartridge	N/A	N/A	Yes	E-FKM	Standard
ECDY0SMK1	30 nm	4"	Cartridge	N/A	N/A	No	Kalrez® 4079	Standard
ECDYPEM0F	30 nm	10"	Chem-Line™ I Large Disposable	PP	3/4" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A	N/A	Standard
ECDYPEM4F	30 nm	10"	Chem-Line™ I Large Disposable	PP	1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A	N/A	Standard
ECLFM1CM01SD	5 nm	10"	Chem-Line™ II Large Disposable	PFA	3/4" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	N/A	N/A	Ultraclean (UC)
ECLFM1CM21SD	5 nm	10"	Chem-Line™ II Large Disposable	PFA	1/2" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	N/A	N/A	Ultraclean (UC)
ECLFM1CM41FD	5 nm	10"	Chem-Line™ II Large Disposable	PFA	In-line 1" inlet/outlet, 1/4" vent/drain, Flaretek® fitting	N/A	N/A	Ultraclean (UC)
ECLFM1CM41SD	5 nm	10"	Chem-Line™ II Large Disposable	PFA	In-line 1" inlet/outlet, 1/4" vent/drain, Super 300 Type Pillar® fitting	N/A	N/A	Ultraclean (UC)