Pumpgard™ II Filter
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- Semiconductor, flat panel display, data storage
- Point-of-tool, wet etch and clean and cleaning processes
- Aggressive acids, aggressive bases, solvents, resist strippers
Specifications
Materials | Filter | PFA net |
Housing | 440 HP PFA | |
Retention rating | 60 μm | |
Filtration area | 23 cm2 (3.5 in2) | |
Inlet/outlet connections | 3/4" tube | |
3/4" Flaretek® fitting | ||
1" Flaretek fitting | ||
Maximum operating conditions | Maximum input pressure | 0.345 MPa (3.45 bar, 50 psi) at 25°C (77°F) |
Maximum forward/reverse differential pressure | 0.345 MPa (3.45 bar, 50 psid) at 25°C (77°F) | |
Maximum operating temperature | 3/4”: 180°C (356°F) at 14 psi | |
1”: 180°C (356°F) at 10 psi |
Successfully Opted for software Updates
Part Number | Length | Connection |
---|---|---|
WDPM0CP0F | 5" | 3/4" Flaretek® fitting |
WDPM0CP4F | 5" | 1" Flaretek® fitting |
WDPM0CPSF | 7" | 3/4" tube fitting |
WDPM0CPST3 | 7" | 3/4" Super 300 type Pillar® fitting |
WDPM0CPSTP | 7" | 3/4" Super type Pillar® fitting |