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1010 Series EUV Pods

Entegris extreme ultraviolet light (EUV) reticle pod is designed defect-free protection of reticles and had demonstrates superior defectivity performance.

  • Patented dual pod design secures reticle for transport and provides reticle protection in a vacuum environment
  • EOP viewing window in pellicle pod version enables viewing of key components inside the inner pod
  • SEMI E152 compliance ensures maximum equipment interoperability
  • Molded-in barcode improves reticle pod cleanliness by eliminating adhesives
  • Read More Read Less
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