150 mm Reticle SMIF Pods
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- Reticle handling
Specifications
Material | STAT-PRO® 435 | |
Reticle capacity | 1 | |
Reticle size | 152 mm × 152 mm × 6.35 mm (5.984” × 5.984” × 0.250”) | |
Weight | Without reticle | 760 grams (1.68 lb) |
With reticle | 1100 grams approx. (2.43 lb) | |
Colors | STAT-PRO 435 | Transparent |
Carbon filled | Opaque |
Successfully Opted for software Updates
Part Number | Label Wall | RFID | Dome Material | Door Type | Description | Product Type |
---|---|---|---|---|---|---|
9701-0106-01 | No | N/A | N/A | N/A | LIT SEAL Q20 RSP 150 | Kit |
9701-0108-01 | No | N/A | N/A | N/A | KIT FILTER CAP Q100 | Kit |
9701-0109-01 | No | N/A | N/A | N/A | KIT FILTER Q100 RSP | Kit |
9702-0021-01 | White | N/A | N/A | N/A | KIT - FLAG-ASML-CANO | Kit |
9702-3172-22 | N/A | Yes | CoolCase (carbon filled) | N/A | KIT RSP150 PEI DOME | Kit |
9702-3173-04 | No | N/A | N/A | N/A | KIT - LATCH 01-03953 | Kit |
9790-0017-02 | No | N/A | N/A | N/A | T FILTER 100 EA | Kit |
RSP1-1001 | No | No | STAT-PRO® 435 | Standard door | FA, RSP150, CLR | RSP150 |
RSP1-1007-0 | White | Yes | STAT-PRO® 435 | Standard door | ASSY RSP150 CLR RFID | RSP150 |
RSP1-1051 | No | No | STAT-PRO® 435 | DiRP door | ASSY RSP150 AK HANDL | RSP150 |
RSP1-1054 | No | Yes | STAT-PRO® 435 | DiRP door | ASSY RSP150 AK HANDL | RSP150 |
RSP1-1073 | No | No | CoolCase (carbon filled) | DiRP door | RSP150 DIRP ATO HDL | RSP150 |
RSP1-1073-4 | No | Yes | CoolCase (carbon filled) | DiRP door | RSP150 PEI DIRP RFID | RSP150 |
RSP1-1074 | No | Yes | CoolCase (carbon filled) | DiRP door | RSP150 DIRP AK HDL W | RSP150 |
RSP1-1082 | Yes | Yes | Clear ABS | DiRP door | DRP150 ATO HDL LBL W | RSP150 |
RSP1-1082-93 | Black and black anti-tilt | Yes | Clear ABS | DiRP door | RSP150 STD DIRP BLK | RSP150 |
RSP1-1082-94 | Black and red anti-tilt | Yes | Clear ABS | DiRP door | RSP150 STD DIRP RED | RSP150 |
RSP1-2082-94 | Red and red anti-tilt | Yes | Clear ABS | DiRP door | RSP150 HVY DIRP RED | RSP150 |
RSP1-2553 | No | No | STAT-PRO® 435 | DiRP door | ASSY RSP150 AK HANDL | RSP150 |
RSP1-2554 | No | Yes | STAT-PRO® 435 | DiRP door | ASSY RSP150 AK HANDL | RSP150 |
RSP1-2574 | No | Yes | CoolCase (carbon filled) | DiRP door | RSP150 DIRP HEAVY AK | RSP150 |
RSP1-2574-1 | No | Yes | CoolCase (carbon filled) | DiRP door | FA, RSP150, OPQ, FR | RSP150 |