Multiple Reticle Pods
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- Mask handling
- Reticle handling
Specifications
Capacity | Up to six reticles |
Reticle size | 5" sq and 6" sq |
UV transmissivity (ABS dome) | ~0% at 470 nm |
ESD performance | <2 seconds |
Weight with cassette | 2200 g |
Footprint | 214 mm x 230 mm (8.4" x 9.1") |
Color | Transparent |
Handle color options | Black, gray, red |
Washability | No disassembly required |
Successfully Opted for software Updates
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9700-7755-01
150 mm MRP wafer lock kit
Part Number | Dome Material | Mask Size | Ergo Handle Color | Cassette | Door Type |
---|---|---|---|---|---|
9700-3549-01 | Clear polycarbonate | 152 mm sq. (6" sq.) | Red | No | None |
9700-9851-01 | Clear ABS | 152 mm sq. (6" sq.) | Red | No | None |
9700-9851-02 | Clear ABS | 152 mm sq. (6" sq.) | Gray | No | None |
9700-9851-50 | Clear ABS | 152 mm sq. (6" sq.) | Gray | Standard | Metal |
9700-9851-51 | Clear ABS | 152 mm sq. (6" sq.) | Gray | Purge | Metal |
9700-9852-02 | Clear ABS | 152 mm sq. (6" sq.) | Red | No | SRP |
9700-9853-01 | Clear ABS | 152 mm sq. (6" sq.) | Red | No | With anti rotation pins |
9700-9856-01 | Clear ABS | 127 mm sq. (5" sq.) | Black | No | With anti rotation pins |