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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
SilicoMax is a dense, micro-conformal, high-purity silicon carbide coating that has very low residual stress. It is amorphous and exhibits high electrical resistivity and wear resistance. This coating exhibits high reflectance/high emissivity in the extreme ultraviolet and can be deposited on a wide variety of substrates.
High-purity, dense and micro-conformal coating with very low residual stress
Oxidation resistant, especially in the presence of moisture
High electrical resistivity
Corrosion resistant in acids and alkalis
Low-temperature plasma deposition process
Coating composition can be tailored from silicon rich to stoichiometric silicon carbide
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ApplicationsSilicoMax™ Coating Applications
EUV optical components
Semiconductor chamber components
Compatibility: Most metals and ceramics
Size: Up to 91 cm (36”)
Geometry: Any shape, including complex geometries
Deposition: <150°C (302°F)
Use: 650°C (1202°F)
A few nm to over 60 μm
High-temperature oxidation resistance in air up to 650°C (1202°F)
Excellent aqueous corrosion resistance including acids and alkalis