Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Ultrapure Silicon is an ultra high-purity silicon coating (99.9995%) that is dense, micro-conformal, highly adherent and extremely smooth for a variety of applications. The silicon coating is deposited by a proprietary Plasma Enhanced Chemical Vapor Deposition (PECVD) process which is versatile and allows for a high degree of flexibility in coating a variety of substrate materials. It has low internal stress, therefore can be deposited in thicknesses ranging from <1 micron to 100+ microns depending on substrate material and finish.
Dense, hard and micro-conformal
Excellent adhesion and compliance on a wide variety of substrates
Excellent surface smoothness
Low residual stress
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Interested in Ultrapure Silicon Coating?
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