Entegris is the global leader in materials integrity management. The company delivers technology, product and service solutions that purify, protect and transport critical materials used in the semiconductor and other high-technology industries. These solutions are manufactured and serviced around the globe, with support in the United States, China, France, Germany, Japan, Malaysia, Singapore, South Korea and Taiwan. Entegris is ISO 9001 certified.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Ultrapure Silicon is an ultra high-purity silicon coating (99.9995%) that is dense, micro-conformal, highly adherent and extremely smooth for a variety of applications. The silicon coating is deposited by a proprietary Plasma Enhanced Chemical Vapor Deposition (PECVD) process which is versatile and allows for a high degree of flexibility in coating a variety of substrate materials. It has low internal stress, therefore can be deposited in thicknesses ranging from <1 micron to 100+ microns depending on substrate material and finish.
Dense, hard and micro-conformal
Excellent adhesion and compliance on a wide variety of substrates
Excellent surface smoothness
Low residual stress
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Interested in Ultrapure Silicon Coating?
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