Ion Implant Beam
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- Electrodes
- High wear beam defining parts
- Structural shielding parts and extraction hardware
- Source area parts
- Analyzer magnet components
Specifications
Typical Material Properties | |||||
---|---|---|---|---|---|
Property | ZEE-2 | DFP-3-2 | SCF-2 | CZR-2 | Pyrograph |
Particle size: | 1 µm (40 µin) |
5 µm (200 µin) |
5 µm (200 µin) |
5 µm (200 µin) |
5 µm (200 µin) |
Apparent density: | 1.77 g/cm³ (0.064 lb/in³) |
1.82 g/cm³ (0.066 lb/in³) |
1.77 g/cm³ (0.064 lb/in³) |
1.65 g/cm³ (0.0596 lb/in³) |
1.53 g/cm³ (0.055 lb/in³) |
Flexural strength: | 103 MPa (15,000 psi) |
83 MPa(12,000 psi) | 93 MPa (13,500 psi) |
61 MPa (8800 psi) |
34 MPa (5000 psi) |
Compressive strength: | 193 MPa (28,000 psi) |
140 MPa (20,000 psi) |
172 MPa (25,000 psi) |
93 MPa (13,500 psi) |
83 MPa (12,000 psi) |
Electrical resistivity: | 3048 µΩ-cm (1200 µΩ-in) |
1524 µΩ-cm (600 µΩ-in) |
2438 µΩ-cm (960 µΩ-in) |
1840 µΩ-cm (725 µΩ-in) |
2145 µΩ-cm (845 µΩ-in) |
Shore hardness: | 100 | 74 | 91 | 70 | 68 |
Coefficients of thermal | 8.4 µm/m°C | 8.1 µm/m°C | 7.6 µm/m°C | 7.8 µm/m°C | 7.8 µm/m°C |
Expansion: | (4.6 µin/in°F) | (4.5 µin/in°F) | (4.2 µin/in°F) | (4.3 µin/in°F) | (4.3 µin/in°F) |
Purity: | <5 ppm | <5 ppm | <5 ppm | <5 ppm | <5 ppm |
Pyrolytic carbon: | 12% pick-up |
1Measured using 4-point bend method. 2Test area = 1.25” diameter/sample thickness - .25”.
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