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For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Regardless of the ion implant equipment or process chemistry, we have a material solution for the components used along the beamline. Our family of materials provide the optimum performance/cost benefits for each area of the beam line. The graphite components are used across all generations and types of implant equipment.
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ApplicationsIon Implant Beam Applications
High wear beam defining parts
Structural shielding parts and extraction hardware
Source area parts
Analyzer magnet components
Typical Material Properties
83 MPa(12,000 psi)
Coefficients of thermal
1Measured using 4-point bend method. 2Test area = 1.25” diameter/sample thickness - .25”.