SUPERSiC®-SP
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Reference Materials
Applications
- Deposition
- Optics processes and applications
Specifications
| Apparent density, g/cm3 (lb/in3) | 3.04 (0.110) | |
| Bulk density, g/cm3 (lb/in3) | 3.00 (0.109) | |
| Total porosity, Pt | 5% | |
| Open porosity, Pop | 1% | |
| Total impurity level | <10 ppm | |
| Flexural strength, MPa (psi) | 220 (31,900) | |
| Tensile strength, MPa (psi) | 162 (23,510) | |
| Elastic modulus, GPa (106 psi) | 373 (54) | |
| Specific stiffness, kN.m/g | 124 | |
| Poisson’s ratio | 0.17 | |
| Dynamic shear modulus, GPa (106 psi) | 159 (23) | |
| Fracture toughness, MPa.m0.5 | N/A | |
| Hardness, kg/mm2 | N/A | |
| Thermal diffusivity, mm2/s | 111 | |
| Thermal conductivity, W/m-K (Btu-ft/hr/ft2°F) | 224 (129) | |
| Instantaneous CTE, 10-6/K (10-6/°F) | 2.4 (1.3) | |
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