SUPERSiC®-Si
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- Etch systems
- Optics silicon cladding
Specifications
| Apparent density: | 3.01 g/cm3 (0.109 lb/in3) |
| Bulk density: | 2.93 g/cm3 (0.106 lb/in3) |
| Total porosity: | 4% |
| Open porosity: | 1% |
| Total impurity level: | <10 ppm |
| Flexural strength: | 192 MPa (27,900 psi) |
| Tensile strength: | 124 MPa (17,940 psi) |
| Elastic modulus: | 331 GPa (48 106 psi) |
| Specific stiffness: | 113 kN.m/g |
| Poisson’s ratio: | 0.17 |
| Dynamic shear modulus: | 138 GPa (20 106 psi) |
| Fracture toughness: | 3.78 MPa.m0.5 |
| Hardness: | 1643 kg/mm2 |
| Thermal diffusivity: | 115 mm2/s |
| Thermal conductivity: | 220 W/m-K (127 BTU-ft/hr/ft2°F) |
| Instantaneous CTE at RT: | 2.4 10-6/K (1.3 10-6/°F) |
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