SUPERSiC®
To discuss your specific needs, contact your local Entegris representative.
Don't have an Entegris representative?
Contact UsThank you for requesting a quote. Someone from Entegris will contact you shortly.
Your quote number is {0}.
- Ion implant
- Plasma etch
- Deposition
- Optical systems
- Aircraft engine components
Specifications
| Apparent density: | 3.13 g/cm3 (0.113 lb/in3) |
| Bulk density: | 2.53 g/cm3 (0.092 lb/in3) |
| Total porosity: | 20% |
| Open porosity: | 19% |
| Total impurity level: | <10 ppm |
| Flexural strength: | 155 MPa (22,400 psi) |
| Tensile strength: | 129 MPa (18,700 psi) |
| Elastic modulus: | 217 GPa (31.4 106 psi) |
| Specific stiffness: | 86 kN.m/g |
| Poisson’s ratio: | 0.17 |
| Dynamic shear modulus: | 97 GPa (14 106 psi) |
| Fracture toughness: | 2.44 MPa.m0.5 |
| Hardness knoop: | 1992 kg/mm2 |
| Thermal diffusivity: | 100 mm2/s |
| Thermal conductivity: | 170 W/m-K (98 BTU-ft/hr/ft2°F) |
| Electrical resistivity: | 0.009 Ω-cm (3700 μΩ-in) |
| Instantaneous CTE at RT: | 2.4 10-6/K (1.3 10-6/°F) |
Successfully Opted for software Updates