A300 FOUPs
Contact your Entegris account manager or
- Front opening unified pod platform that provides clean and secure 300 mm transport and handling
Specifications
25 Capacity | 13 Capacity | ||
Materials of construction | Shell, door housing, door panels | Ultrapure polycarbonate (PC), carbon-filled barrier material |
Carbon-filled barrier material |
Wafer supports and contact areas (shell, door housing, door components) |
Carbon-filled PC, carbon-filled barrier material | Carbon-filled barrier material | |
Door seal | Thermoplastic elastomer | ||
Dimensions | Width | 426 mm (16.8") | |
Depth | 355 mm (14.0") | ||
Height | 338 mm (13.3") | ||
Weight | Empty | 5.4 kg (11.82 lb) | <6 kg (13.23 lb) |
With wafers | 8.2 kg (18.18 lb) | Depends on wafer thickness | |
Wafer spacing | 10 mm (0.39") | 20 mm (0.78") | |
Configuration Options |
|||
25 Capacity | 13 Capacity | ||
Shell and door colors options | Amber, blue, clear, green, red, black (ESD shell only) |
PC clear, EBM black | |
Purge options | Front/rear standard purge Rear advanced diffuser |
Front/rear standard purge | |
Segregation options | Configurable info pads | Configurable info pads | |
Identification options | Colored handles - amber, black, blue, green, red, white, yellow Colored cardholders - amber, green, white Bar code and alphanumeric character labels RFID tags with read/write capability |
Successfully Opted for software Updates