Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
Micro-machined SiC substrate with conformal CVD diamond coating delivers long-life, highly uniform pad conditioning while minimizing substrate damage. Planargem® CMP Pad Conditioners offer leading-edge, customer-tailored performance across all aspects of the CMP Process.
Tunable coating roughness provides alignment with customer performance requirements
CVD diamond coating eliminates defects caused by lost or broken diamonds
Tunable SiC features offer performance flexibility to match customer process
Micro-machined silicon carbide carrier offers superior feature consistency with conditioner life and uniformity improvement
Read MoreRead Less
Specify Your Part
Interested in an Entegris Product?
To discuss your specific needs, contact your local Entegris representative.