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2.5" and Smaller Wafer Carriers
2.5" and Smaller Wafer Carriers
2.5" and Smaller Wafer Carriers
Safely secure 2.5”, 2.25”, and 2” wafers in our convenient, easy to use wafer carriers
Product Type
  • Process wafer carrier
2.5" and Smaller H22 Single Wafer Shippers
2.5" and Smaller H22 Single Wafer Shippers
2.5" and Smaller H22 Single Wafer Shippers
Safely secures 2.5" and smaller wafers in a convenient, easy-to-use package. H22 Single Wafer Shipping Boxes are stackable with multiple closures.
Product Type
  • Single Wafer Shipper
 Size
  • 2.5"
 Industry
  • Semiconductor
 Process
  • Wafer Handling
E200 Maintenance Kits and Accessories
E200 Maintenance Kits and Accessories
E200 Maintenance Kits and Accessories
Replacement filters, gaskets and grommets for E200 wafer SMIF pod doors
Product Type
  • Maintenance kit or accessory
2.5" and Smaller Storage Boxes
2.5" and Smaller Storage Boxes
2.5" and Smaller Storage Boxes
The E04 Wafer Storage Box delivers convenient, one-wafer capacity for 2.5” and smaller wafers
Product Type
  • Storage box
H20 Series Clips and Boxes
H20 Series Clips and Boxes
H20 Series Clips and Boxes
Various clips and boxes for use with our H20 Series 2" square bare die trays
Product Type
  • Clips/boxes
ProE-Vap® 200 Delivery System
ProE-Vap® 200 Delivery System
ProE-Vap® 200 Delivery System
ProE-Vap® 200 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • AlCl3
 Dimensions
  • 331.31 mm (13.04") H
  • 243.84 mm (9.6") W
 OEM Tool
  • Tokyo Electron TELINDY™
  • Lam® Research
 Industry
  • Semiconductor
E2600 Filter Housing
E2600 Filter Housing
E2600 Filter Housing
Advanced protection for optics and resists. Chemically purify environmental air used in photolithography exposure tools.
Contaminants
  • Acids
  • Bases
 Industry
  • Semiconductor
  • Data Storage
 Process
  • Photolithography
ProE-Vap® 100 Delivery System
ProE-Vap® 100 Delivery System
ProE-Vap® 100 Delivery System
ProE-Vap® 100 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • HfCl4
  • ZrCl4
 Dimensions
  • 257 mm (10.12") H
  • 139.7 mm (5.5") W
 OEM Tool
  • ASM Pulsar®
 Industry
  • Semiconductor
E-Beam Crucibles
E-Beam Crucibles
E-Beam Crucibles
E-beam crucibles provide improved evaporation performance. See specifications.
Industry
  • Semiconductor
  • Industrial
 Process
  • Deposition
AXF-5Q Graphite
AXF-5Q Graphite
AXF-5Q Graphite
See specifications for AXF-5Q implantable graphite. Graphite without tungsten impregnation suitable for U.S. FDA Class II and III applications.
Shore Hardness
  • 74
 Apparent Density, g/cm3 (lb/in3)
  • 1.78 (0.064)
 Coefficient of Thermal Expansion, µm/m °C (µin/in °F)
  • 7.9 (4.4)
 Compressive Strength, MPa (psi)
  • 138 (20,000)
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