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NT™ Proportional Control Valves, Model 6300, Cv 5.6 - 10
NT™ Proportional Control Valves, Model 6300, Cv 5.6 - 10
NT™ Proportional Control Valves, Model 6300, Cv 5.6 - 10
The NT™ Proportional Control Valve, Model 6300 Cv 5.6 - 10 is developed for use in ultra high-purity applications. Compatible with highly corrosive processes and designed for use in CMP slurry applications.
Flow Factor
  • > 2.8
 Industry
  • Semiconductor
 Process
  • Bulk Chemical Delivery
  • CMP
  • Photolithography
  • Wafer Growing
  • Wet Etch and Clean
MegaTorr<sup>®</sup> PS9 Nitrogen Gas Purifiers
MegaTorr® PS9 Nitrogen Gas Purifiers
MegaTorr® PS9 Nitrogen Gas Purifiers
Our catalyst and adsorber, PS9, N2 bulk gas purifiers efficiently remove H2O, O2, CO, CO2, H2, and THC at flow rates up to 200,000 slpm (12,000 Nm3/hr).
Gases Purified
  • Nitrogen (N2)
MegaTorr<sup>®</sup> PS6 Oxygen Gas Purifiers
MegaTorr® PS6 Oxygen Gas Purifiers
MegaTorr® PS6 Oxygen Gas Purifiers
Our catalyst and adsorber, PS6, O2 bulk gas purifiers efficiently remove H2O, CO, CO2, H2, and THC at flow rates up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
  • Oxygen (O2)
Rectangular 125 mm Dual Capacity Process Tanks (4.9 Gallons)
Rectangular 125 mm Dual Capacity Process Tanks (4.9 Gallons)
Rectangular 125 mm Dual Capacity Process Tanks (4.9 Gallons)
Our dual capacity 4.9 gallon injection molded tank enables you to process twice as many 125 mm cassettes in half the time
Capacity
  • Dual (4.9 gallons)
 Style
  • Rectanglular
 Wafer Size
  • 125 mm
 Industry
  • Semiconductor
FluoroPure® 6" Diameter PFA Custom Pressure Vacuum Vessel
FluoroPure® 6" Diameter PFA Custom Pressure Vacuum Vessel
FluoroPure® 6" Diameter PFA Custom Pressure Vacuum Vessel
The larger 6" pressure vacuum vessel gives you 2.5 times more volume per inch than the 4" vessels, enabling you to dispense more fluid in less space.
Size
  • 6"
Rectangular 150 mm Dual Capacity Process Tanks (6.1 Gallons)
Rectangular 150 mm Dual Capacity Process Tanks (6.1 Gallons)
Rectangular 150 mm Dual Capacity Process Tanks (6.1 Gallons)
Our dual capacity injection molded tank enables you to process twice as many 150 mm cassettes in half the time
Capacity
  • Dual
 Style
  • Rectanglular
 Wafer Size
  • 150 mm
 Industry
  • Semiconductor
PDS®-A Pure Delivery Source
PDS®-A Pure Delivery Source
PDS®-A Pure Delivery Source
Store and delivers gas subatmospherically
Cylinder Volume
  • 17L
  • 50L
 Gases
  • AsH3
  • PH3
 System Type
  • Subatmospheric storage and delivery (SAGS type I)
 Industry
  • Semiconductor
  • Flat Panel Display
  • Solar
TEB
TEB
TEB
UltraPur™ TEB is a precursor used in CVD process.
CAS #
  • 150-46-9
 Chemical Formula
  • C6H15BO3
 Element
  • Triethylborate
 Industry
  • Semiconductor
TDMAT
TDMAT
TDMAT
UltraPur™ TDMAT is a precursor used in CVD and ALD processes
CAS #
  • 3275-24-9
 Chemical Formula
  • C8H24N4Ti
 Element
  • Tetrakis(dimethylamido)titanium
 Industry
  • Semiconductor
  • Flat Planel Display
Telescopes - Structures and Mirrors
Telescopes - Structures and Mirrors
Telescopes - Structures and Mirrors
Thermally insensitive full silicon carbide assemblies for space, airborne, or ground applications
Industry
  • Aerospace
 Process
  • Optical Systems
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