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MegaTorr<sup>®</sup> PS7-PD Hydrogen Gas Purifiers
MegaTorr® PS7-PD Hydrogen Gas Purifiers
MegaTorr® PS7-PD Hydrogen Gas Purifiers
Our palladium, PS7-PD, series H2 gas purifiers efficiently remove H2O, O2, CO, CO2, H2, THC, N2, He, and Ar at flow rates of up to 2,170 slpm (130 Nm3/hr).
Gases Purified
  • Hydrogen (H2)
MegaTorr<sup>®</sup> PS7-A Hydrogen Gas Purifiers
MegaTorr® PS7-A Hydrogen Gas Purifiers
MegaTorr® PS7-A Hydrogen Gas Purifiers
Our auto regenerable, PS7-A, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, and NMHC at flow rates up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
  • Hydrogen (H2)
MegaTorr<sup>®</sup> PS7-CR Hydrogen Gas Purifiers
MegaTorr® PS7-CR Hydrogen Gas Purifiers
MegaTorr® PS7-CR Hydrogen Gas Purifiers
Our cryogenic, PS7-CR, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, THC, and N2 at flow rates of up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
  • Hydrogen (H2)
MegaTorr<sup>®</sup> PS7-H Hydrogen Gas Purifiers
MegaTorr® PS7-H Hydrogen Gas Purifiers
MegaTorr® PS7-H Hydrogen Gas Purifiers
Our adsorber and getter, PS7-H, H2 gas purifiers efficiently remove H2O, O2, CO, CO2, THC, and N2 at flow rates up to 3,333 slpm (200 Nm3/hr).
Gases Purified
  • Hydrogen (H2)
FluoroPure® 46 Gallon (175 Liter) PFA/PE Composite Drum
FluoroPure® 46 Gallon (175 Liter) PFA/PE Composite Drum
FluoroPure® 46 Gallon (175 Liter) PFA/PE Composite Drum
The PFA liner provides a clean, safe way to transport packing Group 1 chemicals, including mixed acid etch (MAE), in semiconductor and life sciences applications
Material
  • PFA/PE
 Volume
  • 46 gallon (175 liter)
 Industry
  • Semiconductor
  • Water Treatment
  • Life Sciences
  • LED
  • Flat Panel Display
 Process
  • Bulk Chemical Delivery
  • Clean-in-Place (CIP)
  • Chemical Delivery
  • Bioprocessing
  • Fine Chemicals
TMB
TMB
TMB
Ultrapur™ TMB is a precursor used in deposition of doped silicate glass in low pressure, plasma-enhanced CVD process.
CAS #
  • 121-43-7
 Chemical Formula
  • C3H9BO3
 Element
  • Trimethylborate
 Industry
  • Semiconductor
FluoroPure® PGI Trilayer HDPE Drum
FluoroPure® PGI Trilayer HDPE Drum
FluoroPure® PGI Trilayer HDPE Drum
Approved to transport chemicals in Packing Group I chemicals in semiconductor and life sciences applications, and maintains chemical integrity in transport
Configuration
  • Standard diameter
 Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Life Sciences
 Process
  • Chemical Manufacturing
  • Bulk Chemical Delivery
FluoroPure® PGI Advantage Trilayer HDPE Drum
FluoroPure® PGI Advantage Trilayer HDPE Drum
FluoroPure® PGI Advantage Trilayer HDPE Drum
With an approval of 320 kPa our drum meets the requirements for transporting UN Packing Group 1 chemicals in semiconductor and life sciences applications
Configuration
  • Standard diameter
 Industry
  • Semiconductor
  • LED
  • Flat Panel Display
  • Life Sciences
  • Data Storage
 Process
  • Bulk Chemical Delivery
  • Chemical Manufacturing
  • Wet Etch and Clean
  • Lithography
  • Cleaning
  • Bioprocessing
  • Fine Chemicals
  • Magnetic Head Wet Etch and Clean
Protego® AT 2 nm Purifier
Protego® AT 2 nm Purifier
Protego® AT 2 nm Purifier
All-in-one purifier/filter designed for use in sub-7 nm device node fabs in aggressive solvent applications at the POU, in chemical delivery systems, or in bulk chemical manufacturing
Brand Name
  • Protego®
 Chemistry
  • Solvents
 Feature Size (Layer)
  • <7 nm
 Installation Point
  • Point of Tool
Impact® 8G Filter
Impact® 8G Filter
Impact® 8G Filter
Best-in-class, ultra-clean, point-of-use photochemical filter, delivering superior flow rate performance and reduced microbubble formation capabilities.
Brand Name
  • Impact®
 Chemistry
  • Photoresist
  • Photochemical
  • Solvent
 Feature Size (Layer)
  • <10 nm
  • 14-22 nm
  • 28-90 nm
 Installation Point
  • Point of Tool
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