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E200 Maintenance Kits and Accessories
E200 Maintenance Kits and Accessories
E200 Maintenance Kits and Accessories
Replacement filters, gaskets and grommets for E200 wafer SMIF pod doors
Product Type
  • Maintenance kit or accessory
UltraC™-L Coating
UltraC™-L Coating
UltraC™-L Coating
Find UltraC™ -L, a lubricious and low surface energy diamond-like carbon coating at Entegris. Industry-leading PECVD Coating Technology solutions.
Coating Thickness
  • 1 - 10 µm
 Corrosion Resistance
  • Most acids and alkalis
 Electrical Resistivity
  • 105 - 107 Ω-cm
 Hardness
  • 1835 - 2245 HV (18-22 GPa)
ProE-Vap® 200 Delivery System
ProE-Vap® 200 Delivery System
ProE-Vap® 200 Delivery System
ProE-Vap® 200 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • AlCl3
 Dimensions
  • 331.31 mm (13.04") H
  • 243.84 mm (9.6") W
 OEM Tool
  • Tokyo Electron TELINDY™
  • Lam® Research
 Industry
  • Semiconductor
ProE-Vap® 100 Delivery System
ProE-Vap® 100 Delivery System
ProE-Vap® 100 Delivery System
ProE-Vap® 100 Delivery Systems at Entegris – the industry-leading chemical delivery systems since 1966.
Chemistries
  • HfCl4
  • ZrCl4
 Dimensions
  • 257 mm (10.12") H
  • 139.7 mm (5.5") W
 OEM Tool
  • ASM Pulsar®
 Industry
  • Semiconductor
E2600 Filter Housing
E2600 Filter Housing
E2600 Filter Housing
Advanced protection for optics and resists. Chemically purify environmental air used in photolithography exposure tools.
Contaminants
  • Acids
  • Bases
 Industry
  • Semiconductor
  • Data Storage
 Process
  • Photolithography
E-Beam Crucibles
E-Beam Crucibles
E-Beam Crucibles
E-beam crucibles provide improved evaporation performance. See specifications.
Industry
  • Semiconductor
  • Industrial
 Process
  • Deposition
76.2 mm (3") Storage Boxes
76.2 mm (3") Storage Boxes
76.2 mm (3") Storage Boxes
Safe, stackable boxes for storing 76.2 mm (3") wafer carriers during storage and handling operations
Product Type
  • Storage box
 Wafer Size
  • 76.2 mm (3")
E Series Shipping boxes
E Series Shipping boxes
E Series Shipping boxes
Entegris’ E Series line of shipping boxes are ideal for masks or reticles. Available in a variety of sizes, the carriers and boxes are purchased as an assembly.
Box Material
  • Blue ABS
  • Polystyrene
 Carrier Material
  • PVDF
  • HDPE
  • Black polypropylene
 Mask Size
  • 51 mm sq. (2" sq.) to 178 mm rnd (7" rnd)
 Space for Pellicles
  • None
  • Top
  • Bottom
  • Double
2D Bioprocess Assemblies
2D Bioprocess Assemblies
2D Bioprocess Assemblies
Customizable 2D bioprocess assemblies are ideal for single-use biopharmaceutical applications
Bag Film
  • Multilayer
 Size
  • 2 L
  • 10 L
  • 20 L
  • 50 mL
  • 1 L
  • 5 L
  • 50 L
  • 500 mL
  • 250 mL
  • Custom
 Industry
  • Life Sciences
E200 Wafer SMIF Door Assembly
E200 Wafer SMIF Door Assembly
E200 Wafer SMIF Door Assembly
Upgrade the performance of your A200 or M200 wafer SMIF pod with our E200 wafer SMIF pod door assembly
Product Type
  • Door assembly
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