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The NT™ Proportional Control Valve, Model 6300 Cv 5.6 - 10 is developed for use in ultra high-purity applications. Compatible with highly corrosive processes and designed for use in CMP slurry applications.
Flow Factor
- > 2.8
- Semiconductor
- Bulk Chemical Delivery
- CMP
- Photolithography
- Wafer Growing
Our catalyst and adsorber, PS6, O2 bulk gas purifiers efficiently remove H2O, CO, CO2, H2, and THC at flow rates up to 16,667 slpm (1,000 Nm3/hr).
Gases Purified
- Oxygen (O2)
PlanarClean® AG formulated solutions provide superior cleaning in advanced processes while protecting the underlying thin films and materials. The proprietary formulations offer increased performance through enhanced reliability and yield, low to zero corrosion and defects and increased queue time.
Interconnect Technology
Industry
- Cu
- CO
- 28
- 20
- 16
- 14
- Semiconductor
- Post CMP
PlanarClean® AG W100 Cleaning Solutions provide one-step, superior cleaning in advanced processes while protecting the underlying thin films and materials. The proprietary formulations offer increased performance through enhanced reliability and yield, low to zero corrosion and defect and increased queue time.
Interconnect Technology
- W
- 10
- 7
- 5
- Semiconductor
- Post CMP
The larger 6" pressure vacuum vessel gives you 2.5 times more volume per inch than the 4" vessels, enabling you to dispense more fluid in less space.
Size
- 6"
Our dual capacity injection molded tank enables you to process twice as many 150 mm cassettes in half the time
Capacity
- Dual
- Rectanglular
- 150 mm
- Semiconductor
Our catalyst and adsorber, PS9, N2 bulk gas purifiers efficiently remove H2O, O2, CO, CO2, H2, and THC at flow rates up to 200,000 slpm (12,000 Nm3/hr).
Gases Purified
- Nitrogen (N2)
CR8 Series valves are ideal for low- to medium-flow applications, with flow factors from 1.8 – 3.4 Cv. The manual, toggle valve has a compact, modular design, increased temperature capabilities and maximized flow.
Actuator Type
Port Size
- Manual toggle
- 2-way
- Flaretek®
- Super 300 Type Pillar®
- PrimeLock®
- PureBond® pipe
- 1/4"
- 1/2"
- 3/4"
CR8 Series valves are ideal for low- to medium-flow applications, with flow factors from 1.8 – 3.4 Cv. The manual, multi-turn valve has a compact, modular design, increased temperature capabilities and maximized flow.
Actuator Type
Port Size
- Manual multi-turn
- 2-way
- Flaretek®
- Super 300 Type Pillar®
- PrimeLock®
- PureBond® pipe
- 1/4"
- 1/2"
- 3/4"
Repair kits are available to help extend the life of your CR4, CR8 and CH8 Series valves
Accessory Type
- Repair kit