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Valves

High-purity, PFA corrosion-resistant valves provide maximum fluid control of corrosive chemicals, DI water, solvents and slurries


The most complete line of fully characterized, reliable, high-purity valves that meet your temperature, pressure, flow, size, configuration and installation specifications. Sizes from 1/4" to 2" with flow Cv up to 60.

CAD You have the ability to access 3D and 2D product data that is compatible with today's CAD modeling packages. To decrease system design time, simply download parts directly into your design.

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Featured White Paper

download-pdf
Reducing Contamination Points in Clean Chemical Delivery from Manufacture through Point of Use
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Featured White Paper

download-pdf
Reducing Contamination Points in Clean Chemical Delivery from Manufacture through Point of Use
Download Now

Featured White Paper

download-pdf
Reducing Contamination Points in Clean Chemical Delivery from Manufacture through Point of Use
Download Now
Integra® Valves

High-purity, corrosion-resistant Integra® valves offer reliable performance in high-purity, aggressive chemical applications. With no external metal parts, the valves are safe and will not corrode in harsh environments. 
CR and CH Series Valves

High-purity CR and CH Series valves are ideal for handling wet etch and clean process chemicals. The compact valves are reliable in corrosive chemical environments and excel in low- to medium-flow applications.
Cynergy® Valves

Cynergy® valves with beadless weld or industry standard clamp connections are designed for applications involving ultrapure water, water for injection, corrosive chemistries or biotechniques.
EP PFA Valves

We offer a comprehensive line of reliable high-flow, manual and pneumatic valves that meet your needs for large volume chemical delivery.  
Manifolds and Assemblies

Whether a subassembly or an entire system, Entegris can fabricate your unique product utilizing plastic machining, welding, bonding and/or general fabrication. 
Plug Valves

We offer Magnaflo® and fast acting Galtek® plug valves that provide durable, corrosion-resistance in aggressive chemical applications. For use in the same applications as traditional ball valves.
Needle/Metering Valves

Our portfolio of Accuflo™ metering and needle valves, and Galtek® needle valves provide reliable options for you to accurately control media flow in corrosive environments.
Stopcock Valves

We offer reliable stopcock valves for any instrumentation need. 1/8" orifice valves are available in 2-way, 2-way 90° and 3-way configurations.
Check Valves

Corrosion-resistant Galtek® check valves reduce contamination potential in your high-purity chemical applications. An O-ring-free design provides a simple, clean, compact valve with a high flow rate.  
Valve Accessories

Learn about the numerous accessories available that help you secure and maintain Entegris valves used in ultrapure, corrosive fluid applications. 
Integra® Plus WS ESD Valves

Integra® Plus WS ESD Valves safely remove charge from flammable solvents and other nonconductive semiconductor chemistries. The weir-style valve body design streamlines the flow path and eliminates dead volume; ideal in CMP slurry and bulk chemical applications, pneumatic actuation.