Protego® AT 5 nm Purifier
Contact your Entegris account manager or
- Aggressive solvent (like IPA) applications requiring highly efficient metal removal and extreme cleanliness
- Sub-16 nm device nodes, wafer fab equipment, and bulk chemical delivery systems
- Bulk chemical manufacturers supplying chemistries for leading-edge microelectronics market
Specifications
Protego AT Disposable Chem-Line™ II Purifiers |
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Nominal dimensions | |||||
Fitting Size | Super 300 Type Pillar® Fittings | Flaretek® Fittings | |||
Inlet/outlet | Vent/drain | A | B | A | B |
1/2" | 1/4" | 341 mm (13.41") | 37 mm (1.46") | — | — |
3/4" | 1/4" | 350 mm (13.76") | 37 mm (1.46") | 359 mm (14.13") | 37 mm (1.46") |
3/4" | 1/2" | 349 mm (13.74") | 41 mm (1.64") | 363 mm (14.30") | 41 mm (1.64") |
1" | 1/4" | 383 mm (15.07") | 37 mm (1.46") | 368 mm (14.47") | 37 mm (1.46") |
1" | 1/2" | 380 mm (14.97") | 41 mm (1.64") | — | — |
Protego AT Disposable P1500 Purifiers |
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Nominal dimensions | |||||||
Fitting Size | Super Type Pillar Fittings | Super 300 Type Pillar Fittings | Flaretek® Fittings | ||||
Inlet/outlet | Vent/drain | A | B | A | B | A | B |
3/8" | 1/4" | — | — | 141 mm (5.50") | 31 mm (1.22") | 165 mm (6.50") | 32 mm (1.26") |
1/2" | 1/4" | — | — | 146 mm (5.75") | 31 mm (1.22") | — | — |
8 mm | 6 mm | 140 mm (5.51") | 32 mm (1.26") | 135 mm (5.31") | 31 mm (1.22") | — | — |
Protego AT Disposable P3000 Purifiers |
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Nominal dimensions | |||||||
Fitting Size | Super Type Pillar Fittings | Super 300 Type Pillar Fittings | Flaretek® Fittings | ||||
Inlet/outlet | Vent/drain | A | B | A | B | A | B |
3/8" | 1/4" | — | — | 194 mm (7.64") | 31 mm (1.22") | 200 mm (8.66") | 32 mm (1.26") |
1/2" | 1/4" | — | — | 199 mm (7.83") | 31 mm (1.22") | — | — |
8 mm | 6 mm | 194 mm (7.64") | 32 mm (1.26") | 1895 mm (7.44") | 31 mm (1.22") | — | — |
Protego AT Cartridge Purifiers |
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Length | A (overall) | B (control) | C (shoulder) |
10" | 244 mm (9.61") | 227 mm (8.94") | 225 mm (8.86") |
20" | 471 mm (18.54") | 454 mm (17.87") | 452 mm (17.80") |
Protego AT Disposable Purifiers |
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Chem-Line™ II ATE |
P3000 |
1500 |
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Materials | Membrane | PTFE | ||
Supports, shell | PFA | |||
Purification capable | Metal removal | |||
Purification capacity | 4.30 meq | 1.18 meq | 0.48 meq | |
Retention rating | 5 nm | |||
Fitting size | 1/2" I/O, 1/4" V/D Super 300 Type Pillar | 1/2" I/O, 1/4" V/D Super 300 Type Pillar | 3/8" I/O, 1/4" V/D Super 300 Type Pillar | |
3/4" I/O, 1/4" V/D Super 300 Type Pillar | 3/8" I/O, 1/4" V/D Super 300 Type Pillar | 8 mm I/O, 6 mm V/D Super 300 Type Pillar | ||
3/4" I/O, 1/2" V/D Super 300 Type Pillar | 8 mm I/O, 6 mm V/D Super 300 Type Pillar | 8 mm I/O, 6 mm V/D Super Type Pillar | ||
1" I/O, 1/4" V/D Super 300 Type Pillar | 8 mm I/O, 6 mm V/D Super Type Pillar | 3/8" I/O, 1/4" V/D Flaretek | ||
1" I/O, 1/2" V/D Super 300 Type Pillar | 3/8" I/O, 1/4" V/D Flaretek | — | ||
3/4" I/O, 1/4" V/D Flaretek | — | — | ||
3/4" I/O, 1/2" V/D Flaretek | — | — | ||
1" I/O, 1/4" V/D Flaretek | — | — | ||
Operating conditions | Temperature | 80°C (176°F) | ||
Maximum operating pressure | 0.58 MPa @ 25°C (77°F) | |||
Maximum forward differential pressure | 0.44 MPa (4.4 bar, 63.8 psid) @ 25°C (77°F) | 0.39 MPa (3.9 bar, 56.6 psid) @ 25°C (77°F) | 0.39 MPa (3.9 bar, 56.6 psid) @ 25°C (77°F) | |
Maximum reverse differential pressure | 0.29 MPa (2.9 bar, 42.1 psid) @ 25°C (77°F) | |||
Metallic extractables | UCM10P clean | Testing conducted for 23 metals | ||
Other extractables | UCM10P clean | NVR |
Protego AT Cartridge Purifiers |
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10" Cartridge |
20" Cartridge |
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Materials | Membrane | PTFE | |
Supports, core, sleeve | PFA | ||
Purification capable | Metal removal | ||
Purification capacity | 4.30 meq | 8.60 meq | |
Retention rating | 5 nm | ||
Filtration area | 1.77 m2 | 3.54 m2 | |
Operating conditions | Temperature | 80°C (176°F) | |
Maximum forward differential pressure | 0.44 MPa (4.4 bar, 63.8 psid) @ 25°C (77°F) | ||
Maximum reverse differential pressure | 0.34 MPa (3.4 bar, 49.3 psid) @ 25°C (77°F) | ||
Metallic extractables | 23 metals | UCM10P clean | UCM16P clean |
Other extractables | NVR | UCM10P clean | UCM16P clean |
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