H2PS Deoxo Dryer - Zero Loss Gas Purifier
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Process Gas Specifications |
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| Flow rate (maximum purified gas delivered) | 1250 Nm3 /hr – 20,000 Nm3 /hr | |
| 5 MW– 100 MW | ||
| Flow rate (minimum*) | 10% max flow | |
| Inlet pressure | System can be designed for a range of input pressures maxing out at 55 bar | |
| Inlet gas temperature | 5° – 75°C (32° – 167°F) | |
| Outlet gas temperature | Below 35°C (95°F) | |
| *The minimum flow is the lowest flow rate at which Entegris will guarantee that outlet gas purity will be met as well as the minimum flow that must be available from the supply to support regeneration. | ||
Facilities Requirements – Electrical |
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| Main power (customer to specify voltage at time of order) | 208 VAC, 3 phase, 50/60 Hz | |
| 400 VAC, 3 phase, 50/60 Hz | ||
| 480 VAC, 3 phase, 50/60 Hz | ||
| Separate control power (optional – customer to specify voltage at time of order) | 120 VAC, 1 phase, 50/60 Hz | |
| 230 VAC, 1 phase, 50/60 Hz | ||
| 24 VDC | ||
Facilities Requirements – General |
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| Instrument air pressure (clean dry air or nitrogen filtered to 10 µm) | 6.6 barg (95 psig) minimum | |
| 9.7 barg (140 psig) maximum | ||
| Regeneration flow rate (Nm3 /hr) | Determined based on customer requirements | |
| Cabinet ventilation (facilities vacuum) | Based on design flow rate | |
| Indoor installation, ambient temperature | 5° – 35°C (41° – 95°F) | |
| Certifications/Compliance | ASME, PED, KGS, JIS | |
Standard Features |
Optional Features |
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