Vaporsorb™ クリーンルーム用 ケミカルフィルター
- サブ65 nmのテクノロジーノードの半導体製造
- リソグラフィ、エッチング、CPM、計測、レチクル保管の各分野で実証済み
- アウトガスゼロ保証済みの材質
- 正面/背面からアクセスできるフレームバンク、側面からアクセスできるハウジングユニットに取り付け可能
- 天井に取り付けられるファンユニット
仕様書
モデル242412 | モデル122412 | |
定格気流: | 2000 CFM @面速度2.54 m/s | 1000 CFM @面速度2.54 m/s |
高さ: | 592 mm | 287 mm |
幅: | 592 mm | 592 mm |
奥行: | 287 mm | 287 mm |
重量: | 14.5 kg | 9.1 kg |
気流抵抗: | 0.35” 水位計@ 500 ft/min (2.4 m/s) | 0.35” 水位計@ 500 ft/min (2.4 m/s) |
最高使用温度: | 49°C | 49°C |
ソフトウェアのバージョンアップ情報の送付が選択されました
型番 | 重さ | 材料型番 | 奥行 | 高さ | 幅 |
---|---|---|---|---|---|
ESI004797-03 | 14.5 kg | ESI004797-03 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-04 | 14.5 kg | ESI004797-04 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-06 | 14.5 kg | ESI004797-06 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-07 | 14.5 kg | ESI004797-07 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-09 | 14.5 kg | ESI004797-09 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-11 | 14.5 kg | ESI004797-11 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004797-12 | 14.5 kg | ESI004797-12 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI004804-01 | 14.5 kg | ESI004804-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-02 | 7.0 kg | ESI004804-02 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-03 | 7.0 kg | ESI004804-03 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-04 | 7.0 kg | ESI004804-04 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-07 | 7.0 kg | ESI004804-07 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI004804-08 | 7.0 kg | ESI004804-08 | 287.35 mm (11.313") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI005085-03 | 14.5 kg | ESI005085-03 | 287.35 mm (11.313") | 592.15 mm (23.313") | 490.55 mm (19.313") |
ESI005085-05 | 14.5 kg | ESI005085-05 | 287.35 mm (11.313") | 592.15 mm (23.313") | 490.55 mm (19.313") |
ESI005286-01 | 14.5 kg | ESI005286-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006046-01 | 14.5 kg | ESI006046-01 | 228.6 mm (9.0") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006047-01 | 7.0 kg | ESI006047-01 | 228.6 mm (9.0") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI006147-01 | 4.0 kg | ESI006147-01 | 152.4 mm (6.0") | 592.15 mm (23.313") | 287.35 mm (11.313") |
ESI006220-01 | 14.5 kg | ESI006220-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-02 | 14.5 kg | ESI006220-02 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-03 | 14.5 kg | ESI006220-03 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-04 | 14.5 kg | ESI006220-04 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-05 | 14.5 kg | ESI006220-05 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-06 | 14.5 kg | ESI006220-06 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-07 | 14.5 kg | ESI006220-07 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-08 | 14.5 kg | ESI006220-08 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-09 | 14.5 kg | ESI006220-09 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-10 | 14.5 kg | ESI006220-10 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-12 | 14.5 kg | ESI006220-12 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-13 | 14.5 kg | ESI006220-13 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-14 | 14.5 kg | ESI006220-14 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006220-15 | 14.5 kg | ESI006220-15 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006221-06 | 14.5 kg | ESI006221-06 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006253-05 | 14.5 kg | ESI006253-05 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006490-01 | 14.5 kg | ESI006490-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006503-01 | 4.0 kg | ESI006503-01 | 152.40 mm (6.0") | 592.15 mm (23.313") | 592.15 mm (23.313") |
ESI006536-01 | 14.5 kg | ESI006536-01 | 287.35 mm (11.313") | 592.15 mm (23.313") | 490.55 mm (19.313") |
ESI006875-01 | 11.0 kg | ESI006875-01 | 287.35 mm (11.313") | 508 mm (20.0") | 508 mm (20.0") |