Menu
  • Industries
    • Industries
    • Industries
    • Semiconductor
    • Aerospace
    • Data Storage
    • EDM
    • Flat Panel Display
    • General Industrial
    • Glass
    • LED
    • Life Sciences
    • Solar
    • Water Treatment
  • Products
    • Products
    • Products
    • Bare Die/CSP Trays
    • Chemistries
    • Fluid Management
    • Gas Filtration and Purification
    • Hard Disk Component Handling
    • Liquid Filtration and Purification
    • Mask and Reticle Handling
    • Other Substrate Handling
    • Specialty Materials
    • Specialty Gases
    • Wafer Handling
  • Services
    • Services
    • Services
    • Analytical Services
    • Cleaning Services
    • Field Support Services
    • FOUP Services
    • Refurbishment Services
    • Regeneration Services
  • Resources
    • Resources
    • Resources
    • Reference Materials
    • Technical Information
  • About Us
    • About Us
    • About Us
    • Corporate Overview
    • Careers
    • Events
    • Investor Relations
    • Legal/Trademark Notices
    • Locations
    • News
    • Services Overview
  • Sign In / Register
    • Sign In
    • Sign In

      Please sign in to access your account

      Required
      Please enter a valid email address in the field above
      Please enter your password in the field above.
      Forgot Password?
      Forgot Password?
      Click here to sign in as an Entegris employee.
      Request an Account
      Don't have an account? Request one online. Request an Account
      Reset Password

      Please enter the email address for your account. A link to change your password will be emailed to you.

      All Fields Required
      Please enter an Email in the field above
      Cancel
  • My Account
    • My Account
    • My Account
    • Order History
    • My Lists
    • Profile
    • Address Book
    • Saved Credit Cards
    • Manage Users
    • View Business Units
    • Sign Out
  • Quick Order Pad
  • Contact Us
  • Technical Support
  • Contact Us
  • Technical Support
  • Sign Out
  • Sign In / Register
  • My Account
  • Quick Order Pad
  • Cart  

Quick Order Pad

Enter Part Numbers below to add them to your cart

Need to order more than 3 items?
Go to the Quick Order Page

Part Number Quantity
Product Not Found. Please remove or try a different part number.
The Minimum Order Quantity for this item is 1
Product Not Found. Please remove or try a different part number.
The Minimum Order Quantity for this item is 1
Product Not Found. Please remove or try a different part number.
The Minimum Order Quantity for this item is 1
Please correct any errors above before adding to cart.
  • Industries
    • Industries
      • For 50 years, we have delivered innovative solutions to high-tech industries
      • Semiconductor
      • Aerospace
      • Data Storage
      • EDM
      • Flat Panel Display
      • General Industrial
      • Glass
      • LED
      • Life Sciences
      • Solar
      • Water Treatment
  • Products
    • Products
      • Entegris is a global leader in contamination control, critical materials handling, and advanced process materials for the semiconductor and other high-tech industries. Entegris is ISO-9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.
      • Bare Die/CSP Trays
      • Chemistries
      • Fluid Management
      • Gas Filtration and Purification
      • Hard Disk Component Handling
      • Liquid Filtration and Purification
      • Mask and Reticle Handling
      • Other Substrate Handling
      • Specialty Materials
      • Specialty Gases
      • Wafer Handling
  • Services
    • Services
      • We offer high quality, high value services to support your processes. This is how we do it.
      • Analytical Services
      • Cleaning Services
      • Field Support Services
      • FOUP Services
      • Refurbishment Services
      • Regeneration Services
  • Resources
    • Resources
      • Entegris is committed to providing customers the best information possible to ensure optimal product performance. Our resource center provides in-depth product and application information through product data sheets, technical papers, SDSs and more. Be sure to visit the resource center regularly to see updates and new additions.
      • Reference Materials
      • Technical Information
  • About Us
    • About Us
      • For 50 years, Entegris has been a provider of critical products and materials used in advanced high-technology manufacturing. These products and materials are often used to make the building blocks of many of the world's most complex microelectronic products, such as computers, mobile devices and phones, data storage components, televisions and monitors, and automobiles.
      • Corporate Overview
      • Careers
      • Events
      • Investor Relations
      • Legal/Trademark Notices
      • Locations
      • News
      • Services Overview
Close
Product Search Results
Content Search Results
My Account
  • Order History
  • My Lists
  • Profile
  • Address Book
  • Saved Credit Cards
  • Manage Users
  • View Business Units
  • Sign Out
  • Home
  • Industries
  • LED
  • Lithography
Lithography

Solutions that ensure material purity and compatibility with lithography equipment and substrates in the continued advancement of light emitting diodes (LED) technologies.

Our comprehensive portfolio of fluid handling, purification and filtration products enable the manufacturing of LEDs while maintaining purity, improving yields and lowering costs. Look to our reliable and proven bulk chemical and point-of-use solutions to help reduce operating costs and maximize lithography process efficiencies. 

Featured News

Entegris Acquires Particle Sizing Systems, LLC., to Expand the Value of its Product Portfolio for Advanced-Node Manufacturers
Fittings

Clean, robust, leak-free connection technology for high-temperature and high-pressure applications.

Liquid Packaging

Safely transport, store and dispense ultrapure materials in bulk or to the point of use.

Valves

High-purity PFA manual and pneumatic valves provide maximum fluid control of corrosive chemicals, DI water, solvents and slurries.

Fluid Handling Accessories

Reliable, high-purity accessories that complement the most complex fluid network.

In-Line Teflon Gas Filters

Our gas filters provide superior particulate filtration to minimize pressure drop and to maximize filter lifetime. Choose from Wafergard®, Linegard™, Unigard™ and Gasketgard® in-line gas filters.

In-Line Nickel Gas Filters

Entegris' ultra pure nickel filters are the cleanest and most efficient gas filtration products for high pressure, high temperature applications.

In-Line Stainless Steel Gas Filters

Entegris offers a wide variety of filters with stainless steel membrane and stainless steel housing designed for high pressure and high temperature applications.

Liquid Filters

Controlling contaminants in process streams is a vital way to improve operating efficiency and enable technology advances. Entegris offers a variety of membrane and media to match the chemical compatibility and process conditions of each manufacturing environment. 

Stepper and Scanner Filters

Entegris’ stepper and scanner filters are designed to provide reliable protection from airborne molecular contamination sources. Use Entegris filters confidently in a variety of work areas and tool makers.

Track Air Filters

Our track air filters provide superior protection against the full range of total molecular gas phase acids, bases and condensable organics. These high-performance filters remove airborne amines, inorganic acids and organics to a sub-parts-per-billion range.

Tubing and Pipe

Entegris offers PFA PureBond® weldable pipe and a variety of FluoroLine® tube materials, including PFA, for use in highly corrosive applications, and industrial grades for less demanding applications.

Flowmeters

Entegris offers fully molded flow indicators and flowmeters designed for precise metering of corrosive and/or ultrapure fluids in flow ranges from 25 cc to 6000 cc/minute. Performance is calibrated for accuracy of ±5% of full scale.

About Us

  • Corporate Overview
  • Careers
  • Events
  • Investor Relations
  • Legal/Trademark Notices

Customer Service

  • Contact Us
  • Poco Graphite EDM Distributors

Entegris Brands

  • InVue™ Integrated Flow Controllers
  • Purasol™ Photochemical Solvent Purifiers
  • Aramus™ Single-Use Bag Assembly
  • Oktolex™ Tailored Membrane Technology
  • View All Brands

Connect With Us

  • Site Map
  • Privacy Policy

  • Terms & Conditions
  • Legal & Trademark Notices
  • +1 978 436 6500
  • © 1994 - 2019 Entegris, Inc.