• our science our science Our Science
    • By Industry

      • Life Sciences

      • Microelectronics

        • Semiconductor

        • Data Storage

        • Flat Panel Display

        • LED

        • Solar

      • Industrial

        • Aerospace

        • Chemical Manufacturing

        • Chromatography and Analytical

        • Coatings, Inks, and Adhesives

        • General Industrial

        • Glass Forming

        • Polymer Manufacturing

        • Water Treatment

    • By Role

      • Logic Manufacturers

      • Memory Manufacturers

      • Semiconductor Equipment Manufacturers

      • Chemical Suppliers

    • By Solution Area

      • Contamination Control

      • Fluid Management

      • Life Sciences

      • Specialty Materials

      • Substrate Handling

    • By Service

      • Analytical Services

      • Field Support Services

      • FOUP Services

      • Refurbishment Services

      • Regeneration Services

      • Technology Centers

        • China Technology Center

        • Life Sciences Technology Center

  • product catalog product catalog Product Catalog
    • Bare Die/CSP Trays

      • Tray Wizard

      • H20 Series Accessories

      • H44 Series Accessories

    • Chemistries

      • Chemical Delivery Systems

        • Solid Chemical Delivery Systems

        • Liquid Chemical Delivery Systems

      • Specialty Chemicals

        • Catalysts

        • Coating, Ink, and Adhesive Ingredients

          • Resin Monomers and Components

          • Surface Modifiers

        • Post-CMP Cleaning Solutions

          • Semiconductor Cleaning Solutions

            • PlanarClean® Cleaning Solutions

            • ESC Cleaning Solutions

          • Wide Band Gap Semiconductor Cleaning Solutions

          • HDD Media Substrate Cleaning Solutions

        • Post Etch Cleaning Solutions

          • TitanKlean® Cleaning Solutions

          • ST Cleaning Solutions

          • NOE Etchant Cleaning Solutions

        • Precursors

          • Upstream ALD/CVD Precursors

          • Advanced Deposition Materials (ADM) ALD/CVD Precursors

        • Slurries

        • Ligands

        • Silanes

        • Organophosphorus Compounds

        • Specialty Acrylates and Methacrylates

        • Siloxanes

        • Specialty Additives

        • Wafer Reclaim

    • Fluid Management Systems

      • Liquid Packaging

        • Chemical and Bioprocessing Containers

          • FluoroPure® HDPE Blowmolded Drums

            • FluoroPure® Advantage Trilayer HDPE Blowmolded Drums

            • FluoroPure® Trilayer HDPE Blowmolded Drums

          • FluoroPure® Composite Drums

          • FluoroPure® Custom Products

        • Single-Use Assemblies

          • 2D and 3D Bags

          • Mixing Systems

          • Motion Bioreactor Bags

          • Microcarrier and Cell Separation Systems

        • NOWPak® Liner Based Systems

        • Sentry® Quick Connect Systems

        • FluoroPure® Intermediate Bulk Containers

        • FluoroPure® Port Options, Tools and Accessories

        • Tube Sets and Manifolds

        • Custom Dip Tubes, Tanks, and Containers

        • FluoroPure® Pressure Vessels

        • Process Tanks

      • Fluid Handling

        • Fittings

          • PrimeLock® Tube Fittings

          • PrimeLock® ESD Tube Fittings

          • PrimeLock® Accessories

          • Flaretek® Tube Fittings

          • Flaretek® Accessories

          • Cynergy® Fittings

          • Cynergy® Accessories

          • EP PFA Flare Fittings

          • EP PFA Flare Fitting Accessories

          • PureBond® Welded Tube Fittings

          • Quikgrip® Tube Fittings

          • Quikgrip® PFA Nuts

          • Integral Ferrule Tube Fittings

          • Integral Ferrule Accessories

          • Barb PFA Tube Fittings

          • Dual Containment Fittings

          • PureBond® Welded Pipe Fittings

          • PureBond® Accessories

          • NPT Pipe Fittings

          • NPT Accessories

        • Valves

          • CR and CH Series Valves

            • CR4 Series Valves

            • CR8 Series Valves

            • CH8 Series High-Temperature Valves

          • Integra® Valves

          • Cynergy® Valves

          • EP PFA Valves

          • Manifolds and Assemblies

          • SG Series Valves

          • Solenoid Valves

          • Stack Valves

          • Plug Valves

          • Needle/Metering Valves

          • Stopcock Valves

          • Check Valves

          • Valve Accessories

        • Fluid Handling Accessories

          • Gauge Protectors

          • Spray Products

          • Aspirators

          • Fasteners

        • Valves Selection Tool

        • Fittings Selection Tool

        • Tubing and Pipe

        • Custom Products

      • Process Monitoring

        • Process Control

          • Integrated Flow Controllers

          • NT™ Proportional Control Valves

          • Photochemical Dispense Pumps

        • Process Measurement

          • Concentration Monitors

          • Electronic Flowmeters

          • NT™ Pressure Transducers

        • Particle Characterization

    • Gas Filtration and Purification

      • Gas Diffusers

        • Chambergard™ Gas Diffusers

      • Gas Filters

        • In-line Alloy-22 Gas Filters

        • Cartridge Gas Filters

        • Other Gas Filters

        • In-Line PTFE Gas Filters

        • In-Line Stainless Steel Gas Filters

        • In-Line Nickel Gas Filters

        • Surface Mount Gas Filters

      • AMC Filters

        • Stepper and Scanner Filters

        • Process Tool Air Filters

        • Facility Filtration

        • Filter Housings and Stand-alone Filter Cabinets

      • Air and Gas Filter Membranes

      • Gas Purifiers

    • Hard Disk Component Handling

      • Storage Boxes and Individual Disk Packages

      • Read-Write Trays and Carriers

      • Disk Shippers

      • Disk Process Carriers

    • Liquid Filtration and Purification

      • Liquid Filters

      • Liquid Purifiers

      • Liquid Filter Housings

    • Mask and Reticle Handling

      • Reticle Pods and Purge Cabinets

      • Mask Carriers and Shipping Boxes

      • Mask Packages

    • Other Substrate Handling

      • Miscellaneous Device Processing

      • Solar Cell Solutions

    • Specialty Materials

      • Premium Graphite

        • Industrial Graphite Grades

        • Semiconductor Graphite Grades

        • Life Sciences Graphite Grades

        • Premium Graphite Components

        • Glass Forming Graphite Grades

        • GLASSMATE® Components

        • Graphite Processing Options

      • Coatings

        • Chucks

        • Plasma Enhanced Chemical Vapor Deposition (PECVD) Coatings

        • Caerus™ Coating Technology

        • Pegasus™ Coating Technology

      • Premium Silicon Carbide

        • SUPERSiC<sup>®</sup> Silicon Carbide Components

        • SUPERSiC<sup>®</sup> Silicon Carbide

    • Specialty Gases

      • Specialty Gas Mixtures

      • Gas Delivery Cylinder Systems

      • Gas Delivery Cabinet Systems

      • Gases

    • Wafer Handling

      • Wafer Processing

        • CMP Cleaning Brushes

        • CMP Pads and Pad Conditioners

        • 300 mm Front Opening Unified Pods (FOUPs)

        • 200 mm Wafer Processing

        • 200 mm Accessories

        • 150 mm Wafer Processing

        • 150 mm and Smaller Wafer Carrier Accessories

        • 125 mm Wafer Processing

        • 100 mm Wafer Processing

        • 76.2 mm 3" Wafer Processing

        • 2.5" and Smaller Wafer Processing

        • Labware

        • Chucks

      • Wafer Shipping

        • 300 mm Wafer Shippers

        • 200 mm Wafer Shippers

        • 150 mm Wafer Shippers

        • 125 mm Wafer Shippers

        • 100 mm Wafer Shippers

        • 76.2 mm (3") Wafer Shippers

        • 2.5" and Smaller Wafer Shippers

      • Finished Wafer Shipping

        • SmartStack® Contactless Horizontal Wafer Shipper

        • SmartStack® Horizontal Wafer Shippers

        • Film Frame Rings and Shippers

  • resources resources Resources
    • Reference Materials

    • Technical Information

      • Calculators and Tools

      • Chemical Compatibility

      • Chemlock® Filter Housing Technical Information

      • Component Technical Information

      • Entegris Test Standards and Protocols

      • FAQ

      • Formulas

      • Glossary

      • Material Properties and Safety

      • Particle Characterization Applications

    • Industry Insights

      • 3D NAND Solutions

      • Achieving SAE J2719 Quality Hydrogen for Fuel Cells

      • Advanced Coatings

      • Advanced Deposition Materials Innovation

      • Automotive Reliability

      • Cars and Chips: The Acceleration of Electronic Systems

      • Chasing the Perfect Pattern

      • Chemical Mechanical Planarization (CMP)

      • Clean Chemical Delivery

      • Clean Gas Delivery

      • CMP Process Monitoring

      • Dual Containment Tubing

      • Electrostatic Discharge (ESD) Prevention

      • Enabling Advanced Lithography

      • End-to-End Gas Filtration Solutions

      • Food and Beverage Contamination Control

      • Front-end to Back-end Solutions

      • Glass in Front; Glass in Back

      • High Purity Chemical Manufacturing

      • Holistic Approach to Enabling Device Performance, Yield, and Reliability

      • Internet of Things

      • More Than Just a Chip Tray

      • Operational Excellence

      • Particle Characterization

      • Pervasive Defectivity in Semiconductor Manufacturing

      • Protecting Your Data Center Environment from Gas-Phase Contamination

      • The Rare Air of the Semiconductor Fab

      • Silicon Carbide Slurries

      • The Silicon Precursor Toolbox for Low-Temperature Deposition

      • Solid Precursors and Delivery Systems

      • Solutions in Advanced Logic

      • Solving Advanced Technology Challenges with Innovative Materials

      • Storage Class Memory

    • Ensights (Blog)

  • about us about us About Us
    • Corporate Overview

    • Corporate Social Responsibility

    • Careers

    • Events

    • Investor Relations

    • Legal/Trademark Notices

    • Locations

    • News Releases

    • Media Coverage

    • Entegris Blog

Locations


 

CORPORATE HEADQUARTERS

Entegris, Inc.
129 Concord Road, Billerica, MA 01821 USA
T +1 978 436 6500 | F +1 978 436 6735
Map


NORTH AMERICA


UNITED STATES

ARIZONA

7225 W. Oakland Street, Chandler, AZ 85226 USA
T +1 480 889 0263 | F +1 480 858 1802
Map

ARKANSAS

3225 Dow Road, Russellville, AR 72802 USA
T +1 479 968 8810
Map

CALIFORNIA

46716 Lakeview Blvd. Fremont, CA 94538
T +1 408 387 5340 | F +1 408 809 2883
Map

75 Aero Camino, Suite B, Goleta, CA 93117
Map

4175 Santa Fe Road, San Luis Obispo, CA 93401 USA
T +1 805 541 9299 | F +1 805 541 9399
Map

COLORADO

4405 Arrowswest Drive, Colorado Springs, CO 80907 USA
T +1 719 528 2600 | F +1 719 528 2690
Map

CONNECTICUT

Danbury Technology Center
7 Commerce Drive, Danbury, CT 06810 USA
T +1 203 794 1100 | F +1 800 766 2681
Map

FLORIDA

1912 NW 67th Place, Gainesville, FL 32653 USA
T +1 352 334 7270 | F +1 352 224 3385
Map

8203 Kristel Circle, Port Richey, FL 34668 USA
T +1 727 846 0866 | F +1 727 846 0865
Map

MASSACHUSETTS

i2M Center
9 Crosby Drive, Bedford, MA 01730 USA
T +1 781 538 8700 | F +1 781 538 8699
Map

Life Sciences Technology Center
129 Concord Road, Billerica, MA 01821 USA
T +1 978 436 6500 | F +1 978 436 6735
Map

10 Forge Park, Franklin, MA 02038 USA
T +1 508 553 3900 | F +1 508 553 3901
T 1 800 992 0281 (Toll-free in North America)
Map

MINNESOTA

117 Jonathan Boulevard North, Chaska, MN 55318 USA
T +1 952 556 3131 | F +1 952 556 1880
Customer Service T +1 952 556 4181
Customer Service F +1 952 556 8022
Map 

101 Peavey Road, Chaska, MN 55318 USA
T +1 952 556 3131 | F +1 952 556 1880
Map

10851 Louisiana Avenue South, Bloomington, MN 55438 USA
T +1 952 942 0855 | F +1 952 942 8474
Map

NEW YORK

37 Maple Avenue, Scotia, NY 12302 USA
T +1 518 372.5691 | F +1 518 372 5720
Map

NORTH CAROLINA

333 Neils Eddy Road, Riegelwood, NC 28456 USA
T +1 910 655 4212 | F +1 910 655 8201
Map

PENNSYLVANIA

340 Mathers Road, Ambler, PA 19002 USA
T +1 215 364 1155 | F +1 215 364 1583
Map

IsoSciences
Now part of Entegris
340 Mathers Road, Ambler, PA 19002 USA
T +1 610 337 3762 | F +1 610 337 3782
www.isosciences.com
Map

800 West Front Street, Chester, PA 19013 USA
T +1 610 874 4330 | F +1 610 874 3575
Map

TEXAS

706 Houston Clinton Drive, Burnet, TX 78611 USA
T +1 512 756 7314 | F +1 512 756 9889
Map

300 Old Greenwood Road, Decatur, TX 76234 USA
T +1 940 627 2121 | T 1 800 433 5547 (Toll-free in North America)
Map

700 Jeffrey Way, Suite 400, Round Rock, TX 78664 USA
T +1 512 244 5200 | F +1 512 233 5886
Map

UTAH

355 West 1400 North, Logan, UT 84341 USA
T +1 435 755 6113 | F +1 805 541 9399
Map


CANADA

470 Coronation Drive, Toronto, Ontario M1E 4Y4, Canada
T +1 416 231 2991 
Map

EUROPE

FRANCE

Customer Service Center for Southern, Western and Northern Europe
Parc Centr’Alp Ouest, 196 rue du Rocher de Lorzier, 38430 Moirans, France
T +33 4 76 35 73 50 | F +33 4 76 35 73 80
Map

GERMANY

Customer Service Center for Eastern and Central Europe
Hugo-Junkers-Ring 5, Gebäude 107/W, 01109 Dresden, Germany
T +49 351 795 97 0 | F +49 351 795 97 499
Map

ISRAEL

Mevo Sivan 1 Street, 2nd Floor, Kiryat Gat, Israel 8202276
T +972 73 221 00 00 | F +972 73 221 00 22
Map

ASIA/PACIFIC

CHINA

Room 878, Poly Plaza, No. 14, Dong Zhi Men South Avenue
Dongcheng District, Beijing 100027 P.R. of China
T +86 10 6552 8840 | F +86 10 6552 8840 

Hangzhou Anow Microfiltration Co., Ltd.
Sales
Room 801-804, Building 2, 1001 Yuhangtang Road
Xihu District, Hangzhou 310030 P.R. China
T +86 571 2829 3680 | F +86 571 2829 4168
anowfilter.com

Hangzhou Anow Filtration and Materials Co., Ltd.
Plant
No. 22 Qing Quan Road, Xindeng New Area, Xindeng
Fuyang District, Hangzhou 311404 P.R. China
T +86 571 2327 2010

China Technology Center
Room 508, Building A, Henggu 1976, No. 1976, Middle Gaoke Road
Pudong New Area, Shanghai 201210 P.R. of China
T +86 21 8023 6500
Map

5F, Tower 2, German Centre, No.88, Ke Yuan Road
Shanghai 201203 P.R. of China
T +86 21 8023 6500 | F +86 21 5080 5598
Map

Room 21510, Tower C, Shangpin International, No. 88, Gao Xin Road
Hi-Tech Area, Xi'an 710065 P.R. of China
T +86 29 8860 0785 

JAPAN

Mita Kokusai Bldg., 1-4-28 Mita, Minato-ku
Tokyo 108-0073 Japan
T +81 3 5442 9718 | F +81 3 5442 9738
Map

Hakusan Asanomi Bldg., 5-36-9 Hakusan, Bunkyo-ku
Tokyo 112-0001 Japan
T +81 3 3868 0490 | F +81 3 3868 0491
Map

Ichigo Hakataekihigashi Bldg. 1-13-9 Hakataekihigashi, Hakata-ku
Fukuoka 812-0013 Japan
T +81 92 471 8133 | F +81 92 471 8134
Map

Plant No. 1
2-4736-3 Hachimanpara, Yonezawa-shi
Yamagata 992-1128 Japan
Map

Plant No. 2
3-3145-5 Hachimanpara, Yonezawa-shi
Yamagata 992-1128 Japan
Map

SOUTH KOREA

16 Jangangongdan 3-gil, Jangan-myeon
Hwaseong-si, Gyeonggi-do, Korea 18579
T +82 31 8036 9800 | F +82 31 8036 9815
Map

KANC 13F, 109 Gwanggyo-ro, Yeongtong-gu
Suwon-si, Gyeonggi-do, Korea 16229
T +82 31 8065 8300 | F +82 31 8065 8301
Map

85-4 Donghwagongdan-ro, Munmak-eup
Wonju-si, Gangwon-do, Korea 26365
T +82 33 737 8434 | F +82 33 737 8499
Map

Korea Technology Center
KANC 2F and 3F, 109 Gwanggyo-ro, Yeongtong-gu
Suwon-si, Gyeonggi-do, Korea 16229
T +82 31 8065 8300  | T +82 31 8065 8492

MALAYSIA

Lot 17, Phase 1, Kulim Hi-Tech Park, 09000 Kulim, Kedah, Malaysia
T +60 4 427 4200 | F +60 4 403 1262
Map

Unit 1, Lower Level 6, (Main Wing) Hotel Equatorial
No. 1 Jalan Bukit Jambul, 11900 Penang, Malaysia
T +60 4 427 4200 | F +60 4 641 3294
Map

SINGAPORE

30A Kallang Place #13-01, Singapore 339213
T +65 6745 2422 | F +65 6745 4477
Map

TAIWAN

Taiwan Technology Center
1F, No. 669, Section 4, Chung-Hsin Road, Chutung Town
Hsinchu County, 31061 Taiwan (R.O.C.)
T +886 3 582 0858 | F +886 3 582 0895

4F-7, No. 81, Shui-lee Road
Hsinchu, 30059 Taiwan (R.O.C.)
T +886 3 571 0178 | F +886 3 572 9520

1F., No. 6-7, Duxing Road, East Dist.
Hsinchu City 30078 Taiwan (R.O.C.)
T +886 3 565 3000 | F +886 3 565 3099 

Rm. 313/314, 3F, No. 6, Zhongxin Road, Xinshi District
Tainan City 74148 Taiwan (R.O.C.)
T +886 6 589 6008 | F +886 6 501 3799 

No. 647-2, Sec. 3, Minfu Road, Yangmei City
Taoyuan County, 32663 Taiwan (R.O.C.)
T +886 3 565 3000 | F +886 3 472 4459