Magnetic Head - CMP
Solutions that ensure chemical contamination control, clean transport, and advanced flow control performance.
Look to Entegris to reduce operating costs, maximize operational efficiency and improve the value of your chemical product. Entegris offers a variety of liquid filters, fittings, valves, flow controllers and other accessories to remove defect-causing agglomerates and efficiently transport slurry and post-CMP solutions.
The Planargem family of Pad Conditioners have been specifically designed to address both performance and lifetime needs of our customers. Real CVD diamond features provide lifetimes far in excess of standard pad conditioning technology. The Planargem family consists of a number of different products, designed to be compatible with the ever growing range of CMP Pad types.