Disk Process Carriers


Entegris process carriers fit 48 mm, 0.63 mm (2", 0.025") to 95 mm, 1.27 mm (3.75", 0.05") disks with tighteners in the lower position to reduce disk tilt.

Radial disk contact provides a better fit for the disk by curving the disk contact area. Disk lead-in helps "lead" the disk into the slot with a V-shaped feature. Island slots reduce the tippiness when the carrier and disks are submerged in liquid.

Contact us to learn how our process carriers can maintain disk integrity in your process.