Cleaning


Reliable solutions that maintain purity and process control in high-flow cleaning applications.


Entegris offers numerous solutions to safely handle the most aggressive strong acids, oxidizers, solvents, high temperatures and highly concentrated substances used in flat panel display cleaning processes. Our comprehensive line of PFA fluid handling components, including valves, fittings, tubing, pipe, flowmeters, containers and liquid filters, control the process materials and parameters to high levels of repeatability and consistency, improving yields and lowering your costs.

Featured Content