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Bulk Chemical Delivery

Reliable solutions to your bulk chemical delivery challenges that help improve yields, lower costs and improve tool utilization.

Managing process integrity starts with the chemicals that come into direct contact with every wafer and LED produced. Entegris provides a comprehensive portfolio of solutions to help you safely handle and deliver these high purity, microelectronic-grade chemicals. Look to our reliable, proven and innovative solutions to maintain purity, improve yields and lower costs in your bulk chemical delivery applications.

Featured News

Entegris Acquires Particle Sizing Systems, LLC., to Expand the Value of its Product Portfolio for Advanced-Node Manufacturers

Fittings

Clean, robust, leak-free connection technology for high-temperature and high-pressure applications.

Valves

High-purity PFA manual and pneumatic valves provide maximum fluid control of corrosive chemicals, DI water, solvents and slurries.

Fluid Handling Accessories

Reliable, high-purity accessories that complement the most complex fluid network.

Liquid Packaging

Safely transport, store and dispense ultrapure materials in bulk or to the point of use.

Liquid Filters

Controlling contaminants in process streams is a vital way to improve operating efficiency and enable technology advances. Entegris offers a variety of membrane and media to match the chemical compatibility and process conditions of each manufacturing environment.

Tubing and Pipe

Entegris offers PFA PureBond® weldable pipe and a variety of FluoroLine® tube materials, including PFA, for use in highly corrosive applications, and industrial grades for less demanding applications.