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We provide entire system solutions for building a complete, leak-free, reliable fluid handling network from bulk chemical distribution to the point of use.
We have the broadest range of fluid management solutions that maximize fab productivity, improve fab yields and reduce cost of ownership throughout bulk chemical delivery, CMP, WEC and lithography processes.
Learn how our two-stage dispense technology with a built-in Impact® 8G filter manifold enables independent filtration and dispense. Available for low-, medium- and high-viscosity fluids. Communication systems enable you to network your pumps for efficient process monitoring.