We provide entire system solutions for building a complete, leak-free, reliable fluid handling network from bulk chemical distribution to the point of use.
We have the broadest range of fluid management solutions that maximize fab productivity, improve fab yields and reduce cost of ownership throughout bulk chemical delivery, CMP, WEC and lithography processes.
IntelliGen® dispense system technology enables independent, optimum filtration and accurate dispense, providing the ultimate defect reduction viscosity point-of-use photochemical dispense. Available in models optimized for 1-20,000 cP viscosities, IntelliGen dispense system models are optimized to dispense a more uniform topography of photochemical coating on the wafer. The Impact® 8G or Impact 2 V2 (OF style) filters are designed for easy filter replacement.