SEMICON CHINA 2021 - Event Content
Join Entegris at Booth: Hall N3, #3341
Innovation and excellence in one cylinder: VAC® Mixtures
A range of gas mixtures developed to improve your implant productivity, including options for boron, germanium, silicon, and carbon implant species.
Solutions for Unique Challenges of 3D NAND
Design and Manufacturing
Pictorial of 3D NAND manufacturing challenges and Entegris solutions for overcoming them.
Solving Advanced Technology Challenges with Innovative Materials
Pictorial explaining how Entegris is solving advanced technology challenges using a holistic approach in the development of industry-leading formulated chemistries, CMP pad conditioners, and brushes.
Finding the Sweet Spot in Storage Class Memory
Pictorial explaining how phase-change materials can play an increasingly important role in storage class memory (SCM), and how our technology can help enable low-cost and high-performance memory technologies.
The Growing Importance of Process Gas Purification
Pictorial of the growing importance of process gas purification in manufacturing geometrically complex semiconductor devices. View how advanced purification can address multiple trace contaminants in the gas supply to achieve and maintain the purity baseline.
How (and Why) to Address Pervasive Defectivity
Pictorial explaining why we must think of defectivity as pervasive and why coordinated thinking across the value chain is needed to handle it.
A Shock to the System: Defending Against Dangerous Electrostatic Discharge
Pictorial of the dangers of static charge accumulation and harmful electrostatic discharge in PFA fluid handling systems, and Entegris' solution to overcome the many challenges presented by electrostatic hazards.
FOUP Maintenance Increases Longevity, Maximizes Yield
Pictorial of how following industry-leading guidance from Entegris for proper FOUP inspection and maintenance, a fab can increase FOUP life and improve device yield by preventing contamination from worn components.