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Trademarks


ENTEGRIS, INC. U.S. REGISTERED TRADEMARKS 

288-connect® software

Accu-tek® flowmeter
Aeronex® purifiers
ATMI® Advanced Technology Materials Inc.
ATMI® and design
AutoPod® wafer carrier

BrightPak® liquid containment and dispense systems
BrightBlack® precision-engineered carbon material

CAPSil® wafer carrier
Chacollet® purifiers
Chemlock® housing
ChipSentry® material
Clarilite® reticle haze systems and services
Clarilite Certified® reticle haze system components and services
Connectology® technology
Creating a Material Advantage®
Crystalpak® wafer shipping box
Cynergy® sanitary products

Dymension® manifolds

Entegris® (contained on a number of products)
Entegris Rings Design® (contained on a number of products)
Encompass® dispense system
Eximor® photochemical filter

FlareLock® tube fittings
Flaretek® fittings
Fluorogard® filters
FluoroLine® ultrapure tubing
FluoroPure® chemical containers
Fluoroware® wafer handling products

Galtek® fluid handling products
GateKeeper® purifier

Impact® filter and manifolds
Integra® valves
IntelliGen® dispense systems
Intercept® filters 
InVue® measurement instruments, sensing and control products

LiquidLens® UPW systems
Luminousgard® purifiers

Magnaflo® plug valves

NOWPak® liner-based bottle system
NOWTrak® RFID system
NxTi® deposition TiOx precursor

Optimizer® filters and manifolds

PDMPak® system for pressurized applications
PDS® gas containment and delivery system
pHasor® II membrane contactor
pHasor® X heat exchanger
Planarcap® filters
PlanarClean® liquid wafer cleaning chemistry
Planarcore® PVA brushes
Planaredge® retaining rings
Planargard® filter
PrimeLock® fittings
ProcessGard® filter
ProE-Vap® solid source vaporizer and deposition systems
Protego® purifiers
PureBond® fusible piping products

QuickChange® filters and membranes
Quikgrip® fittings

RegenSi® silicon process efficiency solutions
RGEN® dispense systems
Rinsegard® filters

Safe Delivery Source® storage delivery system
SAGE® containment delivery package
Savana® filters/filter housing
SDS® subatmospheric gas storage and delivery system
Sentry® fittings
SilverSet® filters and purifiers
SmartProbe® bottle system keycoded connector
SmartStack® horizontal wafer shipper system
Solaris® manifold and filters
Solopak® shippers and trays
STAT-PRO® material

TitanKlean® liquid post-etch cleaning chemistry
Torrento® filters

Ultrapak® wafer shipping box

VAC® vacuum actuated cylinder

Wafergard® filters and pumps

XCDA® purge gas


ENTEGRIS, INC. COMMON LAW TRADEMARKS OR REGISTERED TRADEMARKS IN NON-U.S. COUNTRIES

26th Wafer™

Accuflo™ metering valve
AluMax™ coatings
Alumax MDM™ coatings
Aramus™ single-use technologies
Astera™ liquid filters

Bag-in-a-Bottle (BIB)™ liner-based bottle system
Bag-in-a-Can (BIC)™ liner-based canister system
Bag-in-a-Drum (BID)™ liner-based drum system
Black Beauty™ and Surmet Black Beauty™ coatings*
Borotex™ coatings
Bulkfill™ precursor material

Caerus™ coatings
Chambergard™ diffuser
ChemFlo™ tubing
Chemgard™ housings
Chem-Line™ filters
Chempure™ purifiers
ChipGuard™ tray inserts
Concept to commercialization℠
Coyote Clean™ canister cleaning process
Cynergy™ Weld-in-Place™ equipment

Design to startup to superior performance℠
Disk Delivery™ systems and services
DiskGuard™ 3000 CF polyetheretherketone material

Embedded Diagnostics™
Entegris™ (words only no rings)
Entegris Rings Design™ (red rings)
EPOD™ rental services
eQual™ table top concentration analyzer
ErgoNOW™ bottle system keycoded connector
ErgoPDM™ bottle system connector
Etchgard™ filters
eVOLV™ eWaste reclaiming technology
Extraction™ filter system and filter housing

FabFit™ wafer shipping box
FlareMount™ sealing technology
Fluorex™ filters
Fluoroline™ filters

Gasketgard™ inline gasket filters
GS-88™ concentration and dew point monitor
GS-88VHP™ concentration and dew point monitor
Guardian™ cartridge filters

IntelliCap™ RFID system closure
IntelliProbe™ RFID system connector
i-Tray™ design software

Joppa27™ chemical

Kaptura™ filters

LDS™ chemical delivery system
Linegard™ filters

MaxMT™ dispense connector
Microgard Minichem™ filters

Optics™ purifier
OxiMax™ coatings

Panelgard™ cartridge filters
Pegasus™ coatings
Photo 250™ dispense
Photo-Cool™ dispense
PI-250™ cartridge filter
Pumpgard™ filters 
Purasol™ solvent purifiers
Pure Advantage™    
Pure Delivery Source™
Pure Delivery System™

Q4000™ manifold valves
Quick Release™ valve

Reactive Micro Matrix™ purification system
RMM™ purification system
RSP3™ purge systems and reticle pods

SilicoMax™ coatings
SmartCap™ closure
SmartProbe™ connector
Spectra™ wafer carrier
SRSensor™ refractive index sensor
ST-250™ liquid post-etch cleaning chemistry
SurfaceLine™ filters
Synctology™ dispense pumps

Tera™ seal
TestGuard™ material
Thermogard™ filters
The Source of Process Efficiency™ filters
The Source of Semiconductor Process Efficiency™ filters
TranSiMax™ coatings
Triclops™ refractive index sensor
Trinzik™ chemical filters
TX-4™ cabinet system with automated software touchscreen

U-Line™ housing
UltraC™ coatings
UltraPur™ materials
Unichem™ cabinet system with automated software touchscreen
Unigard™ filters

VaporSorb™ chemical air filters

Wafershield™ material
Waferstream™ wafer shipping products
Weld-in-Place™ equipment

XILO (zi-low)™

Zintek™ material
Ziramic™ coatings


POCO GRAPHITE, INC. TRADEMARKS

EDM-1® graphite materials
EDM-2® graphite materials
EDM-3® graphite materials
EDM-4® graphite materials
EDM-200® graphite materials
EDM-AF5® graphite materials
EDM-C3® graphite materials
EDM-C200® graphite materials

FABMATE® pyrolytic graphite

GLASSMATE® graphite materials

ILS 1™ holder

POCO® (contained on a number of products)
Pocofoam® graphite foam material

SUPERSiC® silicon carbon

ZEE® graphite materials

Failure of a mark to appear on this page does not mean that  Entegris does not use the mark nor does it mean that the product is not actively marketed nor that it is not significant within its relevant market.


OTHER TRADEMARKS

Other third party trademarks may be used in this Web site or in other publications by Entegris, Inc. or one of its affiliates. This list is neither exclusive nor does Entegris guarantee its accuracy.

3Com® is a trademark of 3Com Corporation

Accusizer® is a trademark of Particle Sizing Systems, Inc.
Alliance® is a trademark of Lam Research Corporation
AMAT™ is a trademark of Applied Materials, Inc.
American Express® is a trademark of American Express Company
Ameritech® is a trademark of Ameritech Inc.
Applied Materials® is a trademark of Applied Materials, Inc.
ASTM® is a trademark of American Society for Testing and Materials
Auriga™ is a trademark of SpeedFam- IPEC
Autoclean® is a trademark of Benzing Technologies, Inc.
Autoetch® is a trademark of Lam Research Corporation

Balazs® is a trademark of Air Liquide Corporation
Barex® is a trademark of BP Chemicals Inc.
Bellofram® is a trademark of The Bellofram Corporation
Bendix™ is a trademark of Amphenol Corporation
BOC™ is a trademark of British Oxygen Corporation

C-22® is a trademark of Haynes International, Inc.
Cabot® is a trademark of Cabot Corporation
Centura® is a trademark of Applied Materials, Inc.
Chemraz® is a trademark of Greene, Tweed and Co.
CIO® is a trademark of International Data Group, Inc.
ConFlat® is a trademark of Varian Associates, Inc.
Convac™ is a trademark of FSI International, Inc.
CYBORPUMP™ is a trademark of Integrated Designs, L.P.
Cyclotene® is a trademark of Dow Chemical Company

Dacron® is a trademark of E. I. du Pont de Nemours and Company
Dell® is a trademark of Dell Computer Corporation
Decon® is a trademark of SP Industries, Inc.
Delrin® is a trademark of E. I. du Pont de Nemours and Company
Deskjet® is a trademark of Hewlett-Packard Company
DeviceNet™ is a trademark of ODVA, Inc.
DeviceNet Conformance Tested® is a trademark of ODVA, Inc.
DeviceNet Conformance Tested (logo)® is a trademark of ODVA, Inc.
Digiboard® is a trademark of Digi International Inc.
DNS™ is a trademark of Dainippon Screen Mfg. Co., Ltd.
DR-DOS™ is a trademark of Novell Incorporated
Durapore® is a trademark of Millipore Corporation
Dwyer® is a trademark of Dwyer Instruments, Inc.

Eastar® is a trademark of Eastman Chemical Company
Eaton® is a trademark of Eaton Corporation
Ebara® is a trademark of Ebara Corporation
Endura® is a trademark of Applied Materials, Inc.
Epigrade® is a trademark of Advanced Technology Materials, Inc.
Ewal® is a trademark of Parker Hahnifin

FAS™ is a trademark of FAS Technologies, Inc.
FastFLARE® is a trademark of Plastitech
Federal Express® is a trademark of Federal Express Corporation
Filmtec® is a trademark of Filmtec Corporation
Flare Grip® is a trademark of Bunnel Plastics, Inc.
Flare-Lok® is a trademark of Crushproof Tubing Company
Florisil® is a trademark of US Silica Co.
Flowell™ is a trademark of Flowell Corporation
Foxy® is a trademark of Isco, Inc.
Frame Maker® is a trademark of Adobe Systems Incorporated
Freon® is a trademark of E. I. du Pont de Nemours and Company
FSI® is a trademark of FSI International, Inc.

Halar® is a trademark of Ausimont USA, Inc.
Hamatech® is a trademark of Steag Hamatech GmbH Machines
Hastelloy® is a trademark of Haynes International, Inc.
Henkel® is a trademark of Kommanditgesellschaft Auf Aktien
Hewlett Packard® is a trademark of Hewlett Packard Company
Hoke® is a trademark of Hoke Incorporated
HP® is a trademark of Hewlett-Packard Company
Hydra® is a trademark of Robbins Scientific Corporation
Hydrolon® is a trademark of Pall Corporation
Hydrosol® is a trademark of Albany International Corp.
Hypalon® is a trademark of E. I. du Pont de Nemours and Company

IBM® is a trademark of International Business Machines Corp.
iMac® is a trademark of Apple, Inc.
Inconel® is a trademark of Inco Alloys International, Inc.
Instron® is a trademark of Instron Corporation
Intel® is a trademark of Intel Corporation
Intellysis™ is a trademark of Nor-Cal Products, Inc.
Intellution® is a trademark of Intellution, Inc.
Iomega® is a trademark of Iomega Corporation
Ionpure® is a trademark of US Filter Corp.
ISO® is a trademark of ISO Properties
Isopar® is a trademark of Exxon Corp.
Isoport™ is a trademark of Millipore Corporation
IsoSciences™ is a trademark of IsoSciences
Iwaki® is a trademark of Iwaki Co., Ltd.

Kalrez® is a trademark of E. I. du Pont de Nemours and Company
Kahn™ is a trademark of Kahn Instruments
KEL-F® is a trademark of 3M Corporation
Klebosol® is a trademark of Societe Francaise Hoechst
Komag® is a trademark of Komag, Inc.
Kovar® is a trademark of CRS Holdings, Inc.
Kynar® is a trademark of The Pennwalt Corporation

Ladish® is a trademark of Ladish Co.
Lam Research® is a trademark of Lam Research Corporation
Lemo® is a trademark of Interlemo Holding S.A.
Levitronix® is a trademark of Levitronix, a wholly owned subsidiary of Pharos, LLC. Lexan® is a trademark of General Electric Company
Liqui-Cel® is a trademark of Membrana-Charlotte, A Division of Celgard, LLC.
LiQuilaz® is a trademark of Particle Measuring Systems
Loctite® is a trademark of Loctite Corporation
Lon® is a trademark of Echelon Corporation
Lontalk® is a trademark of Echelon Corporation
LonWorks® is a trademark of Echelon Corporation
Lucite® is a trademark of ICI Acrylics Inc.
Lumigen® is a trademark of Lumigen, Inc.

Macintosh® is a trademark of Apple, Inc.
Macrosep® is a trademark of Pall Corporation
Mastercard® is a trademark of Mastercard International Inc.
Masterflex® is a trademark Cole Parmer Instrument Company
Micro® is a trademark of International Products Corporation
Microsoft® is a trademark of Microsoft Corporation
Mirra Mesa® is a trademark of Applied Materials, Inc.
Modbus® is a trademark of Gould Inc.
Moldflow® is a trademark of Moldflow Corporation
Monel® is a trademark of Inco Alloys International, Inc.
Motorola® is a trademark of Motorola, Inc.
MPD Chemicals™ is a trademark of Monomer-Polymer and Dajac Labs
MS-DOS® is a trademark of Microsoft Corporation
Mylar® is a trademark of E. I. du Pont de Nemours and Company

NAMSA® is a trademark of North American Science Associates, Incorporated
Naryl™ is a trademark of General Electric Company
NEC® is a trademark of NEC Corporation
NetBIOS/IX® is a trademark of Micro Computer Systems, Inc.
Neuron® is a trademark of Echelon Corporation
NMD-3® is a trademark of Tokyo Ohka Kogyo Co., Ltd.
NMD-W® is a trademark of Tokyo Ohka Kogyo Co. Ltd., Japan
Nonidet™ is a trademark of Royal Dutch/Shell Group
Norprene® is a trademark of Norton Company
Norquay™ is a trademark of Norquay Technology 
Noryl® is a trademark of General Electric Company
Novalac™ is a trademark of Margossian Albert
Novellus® is a trademark of Novellus Systems, Inc.
Nupro® is a trademark of Swagelok Co. 

Oliver™ is a trademark of Lam Research Corporation
OMRON® is a trademark of Omron Corporation
Ontrak® is a trademark of Lam Research Corporation

Pall® is a trademark of Pall Corporation
Palm® is a trademark of Palm Computing, Inc.
Parker® is a trademark of Parker-Hannifin Corporation
Pentium® is a trademark of Intel Corporation
PharMed® is a trademark of Norton Company
Pillar® is a trademark of Nippon Pillar Packing Company, Ltd.
Plexiglas® is a trademark of Rohm & Haas Company
Praxair® is a trademark of Praxair Technology
Precision 5000® is a trademark of Applied Materials, Inc.
PrecisionEtch 5300™ is a trademark of Applied Materials, Inc.
Profile II Plus™ is a trademark of Pall Corporation
Profile® is a trademark of Pall Corporation
Pyralin® is a trademark of E. I. duPont de Nemours and Company
Pyrex® is a trademark of Corning Incorporated
Pyrotell® is a trademark of Associates of Cape Cod, Incorporated

Quantase® is a trademark of Quantase Limited

Rainbow™ is a trademark of Lam Research Corporation
Ready-Safe™ is a trademark of Beckman Instruments, Inc.
Rectus® is a trademark of Rectus-Apparatebau Walter Klein GmbH
Reflexion® is a trademark of Applied Materials, Inc.
Rodel® is a trademark of Rodel, Inc.
Rulon® is a trademark of Dixon Industries Corporation

Sanitech® is a trademark of Sanitech Corporation
Santoprene® is a trademark of Advanced Elastomer Systems
Scott® is a trademark of Scott Specialty Gases, Inc.
Sematech® is a trademark of Sematech, Inc.
SEMI® is a trademark of Semiconductor Equipment and Materials International Corporation
SEMICON® is a trademark of Semiconductor Equipment and Materials International Corporation
Semi Gas Systems® is a trademark of Matheson Tri-Gas, Inc.
ShieldTorch® is a trademark of Agilent Technologies, Inc.
Shodex® is a trademark of Showa Denko K.K. 
Silar™ is a trademark of Silar laboratories                                                              
Slo-Blo® is a trademark of Littelfuse, Inc.                                                            
Sokudo® is a trademark of Sokudo, USA, L.L.C.
Sorvall® is a trademark of E. I. du Pont de Nemours and Company
SPARC® is a trademark of SPARC International, Inc.
SPARCSTATION® is a trademark of SPARC International, Inc.
Spectrasafe® is a trademark of BOC Group, Inc.
Spectra-Seal® is a trademark of The BOC Group, Inc.
SUN® is a trademark of SUN Microsystems, Inc.
Super Type Pillar Fitting® is a trademark of Nippon Pillar Packing Company, Ltd.
Surmet™ is a trademark of Surmet Corporation
Surpass™ is a trademark of Surpass Industry Co., Ltd.
SVG® is a trademark of Silicon Valley Group, Inc.
Swagelok® is a trademark of Swagelok Company

TCP® is a trademark of Lam Research Corporation
Tedlar® is a trademark of E. I. du Pont de Nemours and Company
Teflon® is a registered trademark of The Chemours Company FC, LLC used under license by Entegris, Inc.
Tefzel® is a registered trademark of The Chemours Company FC, LLC used under license by Entegris, Inc.
TEL® is a trademark of Tokyo Electron Kabushiki Kaisha
Tenite® is a trademark of Eastman Kodak Company
THE FIX® is a trademark of Intellution, Inc.
Think Pad® is a trademark of International Business Machines Inc
TI® and the design containing TI in a map of Texas are trademarks of Texas Instruments Inc.
Tri-Clamp® is a trademark of Tri-Clover, Inc.
Triton® is a trademark of Rohm and Haas Company
Tygon® is a trademark of Norton Company
TYVEK® is a trademark of E. I. du Pont de Nemours and Company

Ultrameter™ is a trademark of Myron L. Company

Valox® is a trademark of General Electric
Varian® is a trademark of Varian Medical
VCO® is a trademark of Swagelok Company
VCR® is a trademark of Swagelok Company
versa fast® is a trademark of Turck, Inc.
Vespel® is a trademark of E.I. du Pont de Nemours and Company
VISA® is a trademark of VISA International Service Association
Vaisala™ is a trademark of the Vaisala Group
ViaForm® is a trademark of Enthone-OMI, Inc.
Viton® is a trademark of The Chemours Company FC, LLC used under license by Entegris, Inc.

Whirl-Pak® is a trademark of Nasco International, Inc.
Whitey® is a trademark of Swagelok Company
Windows® is a trademark of Microsoft Corporation
Windows NT® is a trademark of Microsoft Corporation
Wordperfect® is a trademark of Novell, Inc.

Xceda™ is a trademark of Novellus Systems, Inc.

ZETA PLUS® is a trademark of Cuno Incorporated