Entegris Strengthens Commitment to New Product Development and Manufacturing in Taiwan

The first material company in Taiwan to expand capability to high sensitivity (HS) detection by introducing SP3 wafer inspection tool

PUBLISHED Aug. 31, 2018
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Hsinchu, Taiwan – August 31, 2018
– Entegris, Inc., a leader in specialty chemicals and advanced materials solutions, announced today that it has further invested approximately NTD 180 million, or USD 6 million, in Taiwan to meet the increasing yield, reliability and performance demands for advanced nodes and critical semiconductor processes. Entegris has upgraded the capabilities of the Taiwan Technology Center by introducing a high sensitivity SP3 wafer inspection tool and related infrastructure including Class 10 Clean Room and an ACT12 coater. Moreover, Entegris has expanded its Hsinchu facility to increase the manufacturing capacity of Nano Melt Blown (NMB) products for CMP filters.

As semiconductor manufacturers in Taiwan move to advanced nodes, they increasingly require high sensitivity wafer defect detection in their fabs with the aim of improving yield. With the introduction of the SP3 wafer inspection tool at its Taiwan Technology Center, Entegris has expanded its local wafer inspection capability down to 19nm. This new addition, together with the knowledgeable and seasoned team of scientists at the Taiwan Technology Center, enables Entegris to generate its own on-wafer defect data to guide new product development and improve product performance.

As customers strive to improve their next generation critical semiconductor processes, the demand for CMP filtration, especially Entegris NMB products, have been on the rise. To meet this demand, Entegris has expanded its NMB production line in its Hsinchu plant. Working with local engineering team and local customers, Entegris is able to develop and deliver more NMB products to help customers improve their processes, and succeed in the market with a time-to-market advantage.  

“Entegris customers in Taiwan are leading the development of advanced nodes required for critical applications in artificial intelligence, autonomous driving, blockchain, IoT, etc. It is critical that material supplier partners continuously enhance their local development capabilities,” said Todd Edlund, executive vice president and Chief Operating Officer at Entegris. “With continued investment in the Taiwan Technology Center and local manufacturing, Entegris is well positioned to be the partner of choice for our customers, helping them meet the critical yield, reliability and performance challenges they face today and tomorrow.”

Entegris has been investing and expanding its presence in Taiwan over the past 28 years. Its Taiwan Technology Center has been providing R&D and analytical support to customers since its inception in 2006.

In addition to the Hsinchu facility, Entegris has also been manufacturing and servicing locally through facilities in Yangmei, Taoyuan and Hukou. Entegris’ local portfolio includes a broad range of products including CMP and AMC (Advanced Microcontamination Control) filters and HDPE drums, as well as services ranging from pump repair, E-Chuck refurbishment, and wafer-ready cleaning.

About Entegris

Entegris is a leader in specialty chemicals and advanced materials solutions for the microelectronics industry and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan.

Additional information can be found at www.entegris.com.


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Media Contact:  Kitty Xu

Email: kitty.xu@entegris.com

Tel: +86 8023 6591