Entegris Launches New High-performance Purification Solution For DI Water

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BILLERICA, MA, February 9, 2014 - Entegris, Inc. (Nasdaq:ENTG), a leader in contamination control and materials handling technologies for highly advanced manufacturing environments, announced Protego® Plus HT/HTX with 7 nm rated retention, the most advanced purifier/filter for removing metallic contamination from deionized (DI) water while also removing more fine particles than other purifiers on the market. 

As the latest addition to Entegris’ Protego family of liquid purifiers and purifier/filters, the Protego Plus HT/HTX removes metal ions and other contaminants from DI water, a critical material used in manufacturing of semiconductors and other electronics such as flat panel displays. The Protego Plus HT/HTX is designed to perform at temperatures up to 80°C and to retain more particles than higher rated retention products, while offering the highest flow rate and cleanliness on the market today. 

“Manufacturing processes for making next generation semiconductors are requiring even greater purity of process chemistries,” said Todd Edlund, vice president and general manager of Entegris’ Contamination Control Solutions Division. “The presence of very small levels of metals and metallic ions in the manufacturing process can lead to defects and manufacturing yield loss. We are focused on developing and releasing new solutions for achieving these levels of purity, which ultimately have a positive impact on manufacturing yields.” 

The Protego Plus HT/HTX with 7 nm rated retention is the latest addition to the Protego family of filters and purifiers, which recently included a new solution for critical clean IPA applications. The new Protego Plus HT/HTX and other Entegris contamination control and substrate handling solutions will be on display at the SEMICON® Korea 2014 tradeshow, which is being held at COEX exhibition center in Seoul, Korea from February 12 through 14, 2014. 

For more information about Protego, see our website: www.entegris.com or contact your Regional Customer Service Center. 

Entegris is a leading provider of a wide range of products for purifying, protecting and transporting critical materials used in processing and manufacturing in the semiconductor and other high-tech industries. Entegris is ISO 9001 certified and has manufacturing, customer service and/or research facilities in the United States, China, France, Germany, Israel, Japan, Malaysia, Singapore, South Korea and Taiwan. Additional information can be found at www.entegris.com.